Run #71

150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6,074 277 96 T
Poly0 5,118 14 40.4 2.07E-03 26 C
Oxide1 19,181 461
Poly1 20,007 79 16.4 3.28E-03 6C
Oxide2 7,432 223
Poly2 15,026 115 26.4 3.97E-03 7.3 C
Metal 5,111 0.05 2.76E-06 23.62 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #70
150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5,886 355 81 T
Poly0 5,165 32 30.2 1.56E-03 19 C
Oxide1 20,340 718
Poly1 20,311 96 12.9 2.62E-03 6.00 C
Oxide2 7,476 217
Poly2 15,186 82 28.9 4.39E-03 4.67 C
Metal 5,214 0.06 2.87E-06 21.87 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #69
150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5,968 506 95 T
Poly0 5,011 77 28.1 1.41E-03 24.3 C
Oxide1 18,884 405
Poly1 20,132 116 10.5 2.11E-03 8.00 C
Oxide2 6,915 26
Poly2 14,966 87 20.9 3.13E-03 7.66 C
Metal 5,117 0.06 2.81E-06 15.76 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #68
150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6,008 292 95 T
Poly0 4,999 51 35.6 1.78E-03 16.33 C
Oxide1 19,810 316
Poly1 19,922 220 13.9 2.77E-03 6.33 C
Oxide2 7,582 72
Poly2 14,605 240 28 4.09E-03 6.00 C
Metal 5,245 0.05 2.52E-06 17.13 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #67
150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5,805 192 88 T
Poly0 5,014 33 29.8 1.49E-03 9C
Oxide1 20,191 324
Poly1 20,044 256 11.6 2.33E-03 8.5 C
Oxide2 7,442 100
Poly2 14,888 104 21.8 3.25E-03 7.6 C
Metal 4,971 0.06 2.88E-06 20.1 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #66
150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6,136 115 78.5 T
Poly0 5,010 26 31.4 1.57E-03 33 C
Oxide1 20,497 477
Poly1 19,782 141 24.3 4.81E-03 6.3 C
Oxide2 7,521 129
Poly2 14,960 94 12.3 1.84E-03 7.3 C
Metal 5,421 0.05 2.66E-06 25.7 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #65
150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5,960 497 75.5 T
Poly0 5,040 45 33.1 1.67E-03 25.3 C
Oxide1 18,585 596
Poly1 19,954 153 13.07 2.61E-03 5C
Oxide2 7,544 25
Poly2 15,048 103 25.18 3.79E-03 5.3 C
Metal 5,176 0.06 3.00E-06 15.4 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #64
150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5,977 206 60 T
Poly0 5,018 50 30.7 1.54E-03 24 C
Oxide1 19,123 857
Poly1 19,977 72 11.2 2.24E-03 7C
Oxide2 7,304 267
Poly2 14,986 130 19.7 2.95E-03 8C
Metal 5,150 0.06 3.09E-06 18 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #63
150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6,171 195 68 T
Poly0 5,020 84 28.45 1.43E-03 24 C
Oxide1 20,452 1267
Poly1 20,108 307 11.98 2.41E-03 7C
Oxide2 7,581 446
Poly2 15,015 200 30.48 4.58E-03 15 C
Metal 5,188 0.05 2.59E-06 21 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #62
150mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6,171 195 68 T
Poly0 5,020 84 28.45 1.43E-03 24 C
Oxide1 20,452 1267
Poly1 20,108 307 11.98 2.41E-03 7C
Oxide2 7,581 446
Poly2 15,015 200 30.48 4.58E-03 15 C
Metal 5,188 0.05 2.59E-06 21 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #61
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6,212 401 119 T
Poly0 5,012 68 24.07 1.21E-03 27 C
Oxide1 20,589 787
Poly1 20,351 301 9.61 1.69E-03 1C
Oxide2 7,687 256
Poly2 15,068 236 20.96 3.16E-03 12 C
Metal 5,310 0.05 2.78E-06 17 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #60
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5,980 243 114 T
Poly0 5,055 62 25.84 1.31E-03 27 C
Oxide1 19,591 330
Poly1 19,995 281 10.39 2.08E-03 5C
Oxide2 7,253 289
Poly2 15,826 768 25.33 4.01E-03 11 C
Metal 5423 0.05 2.71E-06 24 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #59
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6087 231 103 T
Poly0 5123 10 26.63 1.36E-03 31 C
Oxide1 21009 460
Poly1 19977 677 10.76 2.15E-03 13 C
Oxide2 7788 243
Poly2 14867 192 22.66 3.37E-03 13 C
Metal 5460 0.05 2.87E-06 15 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #58
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6,000 261 119 T
Poly0 5,104 48 29.3 1.50E-03 34 C
Oxide1 20,174 593
Poly1 19,845 220 13.56 2.69E-03 13 C
Oxide2 7,440 242
Poly2 15,083 203 23.35 3.52E-03 18 C
Metal 5490 0.05 2.80E-06 33 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #57
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6104.53 262.07 68.617 T
Poly0 5033 80.24 26.93 1.36E-03 37.869 C
Oxide1 19878.75 286.74
Poly1 20095.93 327.58 10.3 2.07E-03 11.235 C
Oxide2 7376.36 133.19
Poly2 15036.67 253.56 21.22 3.19E-03 9.834 C
Metal 5704 0.05 3.08E-06 28.655 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #56
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6062.47 283.85 142.074 T
Poly0 5078.4 72.62 25.37 1.29E-03 28.466 C
Oxide1 19971.6 671.84
Poly1 20028.2 350.39 9.83 1.97E-03 14.582 C
Oxide2 7482.24 196.55
Poly2 15073.07 241.95 16.55 2.49E-03 14.364 C
Metal 5589.75 0.05 2.70E-06 23.65 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #55
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6129.93 274.92 - - 82.02 T
Poly0 4958.33 65.09 26.79 1.33E-03 12.843 C
Oxide1 19414.08 259.17 - - -
Poly1 19971.6 288.31 9.99 1.99E-03 7.981 C
Oxide2 7282.76 180.01 - - -
Poly2 14987.87 220.62 18.74 2.81E-03 13.368 C
Metal 5177 - 0.05 2.80E-03 27.54 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #54
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5977 206 - - 150 T
Poly0 5144 43 23.43 1.2 E-3 27 C
Oxide1 20252 691 - - -
Poly1 20320 213 9.13 1.9 E-3 17 C
Oxide2 7580 308 - - -
Poly2 15110 153 16.53 2.5 E-3 9C
Metal 5404 - 0.05 2.7 E-6 23 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #53
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6223.9 251.12 - - 15.23 T
Poly0 5112.6 245.02 24.09 1.23 E-03 37.582 C
Oxide1 20731.84 981.49 - - -
Poly1 20009.8 191.57 9.21 1.84 E-03 3.083 C
Oxide2 7442.3 172.12 - - -
Poly2 14952.8 144.26 15.54 2.32 E-03 5.63 C
Metal 5161 - 0.05 2.81 E-06 23.155 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #52
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5796.33 209.43 - - 77.74 T
Poly0 5054.6 50.02 26.74 1.35 E-03 30.508 C
Oxide1 19406.3 375 - - -
Poly1 19935.87 191 9.96 1.99 E-03 10.205 C
Oxide2 7537.72 325.06 - - -
Poly2 14952.73 144.26 14.53 2.17 E-03 8.694 C
Metal 5211 - 0.05 2.71 E-06 30.729 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #51
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5973.8 260.34 - - 163.50 T
Poly0 4972.07 42.49 26.96 1.34 E-03 31.35 C
Oxide1 20132.32 350.31 - - -
Poly1 20480.87 197 11.32 2.32 E-03 11.09 C
Oxide2 7268.92 267.36 - - -
Poly2 15698.4 682.79 20.54 3.22 E-03 7.53 C
Metal 5510.5 - 0.05 2.81 E-06 35.54 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #50
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5992 249.49 - - 165.35 T
Poly0 4958 35.59 25.57 1.27 E-03 28.53 C
Oxide1 20567.1 509.34 - - -
Poly1 20038.13 198.02 10.15 2.03 E-03 10.01 C
Oxide2 7253.15 99.86 - - -
Poly2 15082.93 155.46 21.68 3.27 E-03 10.31 C
Metal 5133.5 - 0.05 2.67 E-06 33.17 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #49
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6043 266.45 - - 161.37 T
Poly0 5099 47.92 24.6 1.25 E-3 32.77 C
Oxide1 20939 837.99 - - -
Poly1 20009 185.55 9.6 1.92 E-3 9.97 C
Oxide2 7410 106.75 - - -
Poly2 15305 174.28 15.7 2.40 E-3 4.23 C
Metal 4985 - 0.06 2.99 E-6 24 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #48
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5852 294.76 - - 153.99 T
Poly0 4806 762.65 24.14 1.16 E-3 38.85 C
Oxide1 19591 297.65 - - -
Poly1 20529 162.27 9.82 2.02 E-3 15.46 C
Oxide2 7664 225.77 - - -
Poly2 15362 142.09 18.83 2.89 E-3 9.53 C
Metal 5370 - 0.05 2.89 E-6 35.91 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #47
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6193 238 - - 168 T
Poly0 5166 36 29.51 1.52 E-3 33 C
Oxide1 19870 793 - - -
Poly1 20334 168 10.54 2.14 E-3 16 C
Oxide2 7581 200 - - -
Poly2 15056 386 15.53 2.34 E-3 11 C
Metal 5628 - 0.05 2.81 E-6 20 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #46
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6024 243 - - 171 T
Poly0 5176 49 23.51 1.2 E-3 36 C
Oxide1 20149 721 - - -
Poly1 20186 178 11.04 2.2 E-3 12 C
Oxide2 7400 359 - - -
Poly2 15224 124 16.52 2.5 E-3 11 C
Metal 5246 - 0.05 2.6 E-6 13 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #45
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5977 206 - - 150 T
Poly0 5144 43 23.43 1.2 E-3 27 C
Oxide1 20252 691 - - -
Poly1 20320 213 9.13 1.9 E-3 17 C
Oxide2 7580 308 - - -
Poly2 15110 153 16.53 2.5 E-3 9C
Metal 5404 - 0.05 2.7 E-6 23 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #44
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5911 281 - - 132 T
Poly0 5140 24 27.2 1.3 E-3 32 C
Oxide1 20000 766 - - -
Poly1 20278 150 11.16 2.2 E-3 10 C
Oxide2 7633 125 - - -
Poly2 15139 109 20.39 3.0 E-3 6C
Metal 4786 - 0.06 2.8 E-6 16 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #43
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5890 291 - - 141 T
Poly0 4901 33 26.63 1.3 E-3 37 C
Oxide1 20529 678 - - -
Poly1 19717 145 10.99 2.2 E-3 9C
Oxide2 7405 407 - - -
Poly2 15088 75 17.64 2.7 E-3 6C
Metal 4741 - 0.06 2.8 E-6 29 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #42
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6041 285 - - 153 T
Poly0 5054 36 25.47 1.2 E-3 44 C
Oxide1 20975 541 - - -
Poly1 19789 201 10.37 2.0 E-3 9C
Oxide2 7586 290 - - -
Poly2 14518 94 27.56 4.0 E-3 7C
Metal 5025 - 0.05 2.5 E-6 28 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #41
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5957 318 - - 126 T
Poly0 4888 339 25.9 1.3 E-3 28 C
Oxide1 21642 738 - - -
Poly1 20141 262 10.4 2.1 E-3 8C
Oxide2 7419 396 - - -
Poly2 15034 155 18.74 2.8 E-3 4C
Metal 4877 - 0.06 2.9 E-6 18 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #40
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6076 282 - - 148 T
Poly0 5059 47 26.74 1.3 E-3 24 C
Oxide1 20404 418 - - -
Poly1 20309 216 10.33 2.1 E-3 1C
Oxide2 7446 230 - - -
Poly2 15100 167 18.35 2.7 E-3 13 C
Metal 5025 - 0.05 2.5 E-6 19 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #39
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6047 292 - - 169 T
Poly0 4492 29 26.5 1.3 E-3 25 C
Oxide1 20873 584 - - -
Poly1 19973 248 10.65 2.1 E-3 8C
Oxide2 7397 110 - - -
Poly2 14979 185 20.16 3.0 E-3 1C
Metal 4888 - 0.06 2.9 E-6 17 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #38
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5985 264 - - 137 T
Poly0 5018 38 26.59 1.3 E-3 25 C
Oxide1 19967 603 - - -
Poly1 19946 196 11.02 2.1 E-3 8C
Oxide2 7921 195 - - -
Poly2 15134 164 19.28 2.9 E-3 7C
Metal 5150 - 0.05 2.5 E-6 30 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #37
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6323 301 - - 131 T
Poly0 5102 28 25.38 1.2 E-3 43 C
Oxide1 20187 491 - - -
Poly1 19926 193 11.19 2.2 E-3 10 C
Oxide2 7563 162 - - -
Poly2 15053 129 17.81 2.6 E-3 7C
Metal 4789 - 0.06 2.8 E-6 23 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #36
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6045 374 - - 130 T
Poly0 5087 35 26.1 1.3 E-3 16 C
Oxide1 20194 437 - - -
Poly1 19968 206 10.49 2.0 E-3 1C
Oxide2 7361 170 - - -
Poly2 15178 170 20.05 3.1 E-3 9C
Metal 5170 - 0.05 2.5 E-6 60 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #35
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6113 258 - - 129 T
Poly0 5089 19 26.1 1.3 E-3 29 C
Oxide1 20168 564 - - -
Poly1 19967 163 10.49 2.0 E-3 7C
Oxide2 7466 170 - - -
Poly2 15183 118 20.5 3.1 E-3 3C
Metal 5231 - 0.05 2.6 E-6 60 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #34
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6011 251 - - 121 T
Poly0 5057 51 27.2 1.3 E-3 39 C
Oxide1 19710 692 - - -
Poly1 19997 221 10.33 2.0 E-3 10 C
Oxide2 7357 148 - - -
Poly2 15010 222 20.83 3.1 E-3 7C
Metal 5170 - 0.06 3.1 E-6 43 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #33
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6024 245 - - 62 T
Poly0 5075 35 27.2 1.3 E-3 32 C
Oxide1 21380 - - - -
Poly1 19660 161 10.33 2.0 E-3 8C
Oxide2 7102 278 - - -
Poly2 15027 427 20.83 3.1 E-3 5C
Metal 5607 - 0.05 2.9 E-3 51 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #32
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6336 230 - - 98 T
Poly0 5175 51 27.54 1.4 E-3 15 C
Oxide1 19455 410 - - -
Poly1 19810 314 10.5 2.0 E-3 6C
Oxide2 7565 141 - - -
Poly2 14846 122 21.46 3.1 E-3 6C
Metal 5161 - 0.05 2.5 E-6 40 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #31
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6052 191 - - 124 T
Poly0 4932 33 25.87 1.2 E-3 27 C
Oxide1 19881 435 - - -
Poly1 20030 87 8.23 2.0 E-3 12 C
Oxide2 7369 56 - - -
Poly2 15085 159 14.37 2.1 E-3 12 C
Metal 5350 - 0.06 - 32 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #30
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6032 145 - - 23 T
Poly0 5168 23 31.88 1.6 E-3 30 C
Oxide1 20731 423 - - -
Poly1 20040 67 10.24 2.0 E-3 28 C
Oxide2 7323 182 - - -
Poly2 15021 47 21.65 3.2 E-3 5C
Metal - - 54.6 - -

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #29
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6182 194 - - 34 T
Poly0 5097 17 31.88 1.6 E-3 18 C
Oxide1 19416 285 - - -
Poly1 20020 75 10.24 2.0 E-3 6C
Oxide2 7537 225 - - -
Poly2 14810 65 21.65 3.2 E-3 5C
Metal 4700 89.34 54.6 - 97 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #28
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5944 301 - - 28 T
Poly0 5097 17 24.4 1.2 E-3 23 C
Oxide1 19973 - - - -
Poly1 20390 86 10.23 2.0 E-3 7C
Oxide2 7848 278 - - -
Poly2 14690 42 16.83 2.4 E-3 8C
Metal 5055 - - - 44 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #27
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6059 277 - - 36 T
Poly0 5083 15 28.63 1.4 E-3 38 C
Oxide1 20044 - - - -
Poly1 20350 144 10.46 2.1 E-3 6C
Oxide2 7136 - - - -
Poly2 14910 49 17.03 2.5 E-3 6C
Metal - - - - 64 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #26
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5954 270 - - 78 T
Poly0 5167 16 28.62 1.4 E-3 23 C
Oxide1 20140 844 - - -
Poly1 20051 544 10.46 2.0 E-3 9C
Oxide2 7745 109 - - -
Poly2 15121 55 17.03 2.5 E-3 10 C
Metal - - - - 49 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #25
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5878 286 - - 72 T
Poly0 5050 13 24.3 1.2 E-3 19 C
Oxide1 19894 443 - - -
Poly1 20035 493 9.33 1.8 E-3 10 C
Oxide2 7619 345 - - -
Poly2 15319 47 19.51 2.9 E-3 8C
Metal 5438 - 0.05 - 48 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #24
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6102 268 - - 57 T
Poly0 5147 16 31.3 1.6 E-3 24 C
Oxide1 19822 538 - - -
Poly1 19924 532 16.8 3.3 E-3 3C
Oxide2 7696 142 - - -
Poly2 14908 382 23.7 3.5 E-3 7C
Metal 4925 - 0.06 - 60 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #23
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6007 205 - - 90 T
Poly0 5122 14 24.5 1.2 E-3 28 C
Oxide1 19893 592 - - -
Poly1 19392 524 11.7 2.2 E-3 6C
Oxide2 7568 186 - - -
Poly2 14735 42 22.2 3.2 E-3 8C
Metal 4913 168 0.05 - 56 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #22
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6054 210 - - 101 T
Poly0 4990 15 26 1.2 E-3 20 C
Oxide1 20523 1149 - - -
Poly1 19352 493 9.2 1.7 E-3 9C
Oxide2 7640 271 - - -
Poly2 14978 51 16.5 2.4 E-3 10 C
Metal 4913 168 0.05 - 68 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #21
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6060 108 - - 89 T
Poly0 4891 38 24.3 1.1 E-3 30 C
Oxide1 20560 270 - - -
Poly1 19263 422 10.8 2.0 E-3 8C
Oxide2 7216 348 - - -
Poly2 14647 46 21.2 3.1 E-3 8C
Metal 5213 338 0.05 - 57 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #20
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5990 165 - - 132 T
Poly0 5001 12 25.8 1.2 E-3 24 C
Oxide1 19794 533 - - -
Poly1 19428 45 10.8 2.0 E-3 8C
Oxide2 7440 178 - - -
Poly2 14837 68 20 2.9 E-3 9C
Metal 5250 - 0.05 - 95 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #19
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5695 161 - - 69 T
Poly0 5057 33 27.6 1.3 E-3 31 C
Oxide1 19293 696 - - -
Poly1 19646 482 6.9 1.3 E-3 10 C
Oxide2 7634 211 - - -
Poly2 15384 64 17.8 2.7 E-3 10 C
Metal 4841 - 0.06 - 57 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #18
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6068 174 - - 160 T
Poly0 5017 24 26.3 1.3 E-3 29 C
Oxide1 19653 1019 - - -
Poly1 19655 505 9.77 1.9 E-3 9C
Oxide2 8032 280 - - -
Poly2 15379 57 15 2.3 E-3 13 C
Metal 5262 130 0.05 - 50 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #17
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5903 222 - - 105 T
Poly0 5010 19 25.3 1.2 E-3 26 C
Oxide1 20073 467 - - -
Poly1 19739 528 12.4 2.4 E-3 5C
Oxide2 7581 267 - - -
Poly2 14935 233 23.1 3.4 E-3 6C
Metal 5027 - 0.06 - 68 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #16
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5994 96 - - 96 T
Poly0 5042 20 26.6 1.3 E-3 24 C
Oxide1 21327 250 - - -
Poly1 19708 92 9 1.8 E-3 9C
Oxide2 7713 260 - - -
Poly2 14882 310 22.9 3.4 E-3 9C
Metal 4507 249 0.06 - 48 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #15
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5966 87 - - 110 T
Poly0 4957 15 26.7 1.3 E-3 19 C
Oxide1 20527 587 - - -
Poly1 19572 536 9.9 1.9 E-3 12 C
Oxide2 7634 205 - - -
Poly2 14955 333 31 4.6 E-3 8C
Metal 4619 - 0.07 - -

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #14
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5819 100 - - 116 T
Poly0 5060 22 30 1.5 E-3 34 C
Oxide1 19713 403 - - -
Poly1 19899 527 9.1 1.8 E-3 8C
Oxide2 7344 160 - - -
Poly2 14555 500 17.1 2.5 E-3 10 C
Metal 4564 - - - 57 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #13
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5807 100 - - 158 T
Poly0 5050 18 32.7 1.7 E-3 16 C
Oxide1 20285 357 - - -
Poly1 19954 184 10.5 2.1 E-3 6C
Oxide2 7645 106 - - -
Poly2 14794 167 21.2 3.1 E-3 10 C
Metal 4731 - 0.06 - -

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #12
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6156 69 - - 184 T
Poly0 5016 29 34.3 1.7 E-3 22 C
Oxide1 19803 78 - - -
Poly1 19946 167 13.4 2.7 E-3 10 C
Oxide2 7508 70 - - -
Poly2 15441 73 20.9 3.2 E-3 11 C
Metal 5200 - 0.06 - -

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #11
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6051 49 - - -
Poly0 4987 19 39.28 2.0 E-3 19 C
Oxide1 20825 198 - - -
Poly1 19869 535 13.79 2.7 E-3 4C
Oxide2 7352 80 - - -
Poly2 15154 555 19.1 2.9 E-3 11 C
Metal 5340 - 0.05 - 20 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #10
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5898 77 - - 67 T
Poly0 4994 18 31.07 1.6 E-3 4C
Oxide1 19159 191 - - -
Poly1 19720 498 12.6 2.5 E-3 10 C
Oxide2 7565 79 - - -
Poly2 14825 548 22.1 3.3 E-3 10 C
Metal 5215 - 0.06 - 39 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #9
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6243 72 - - 67 T
Poly0 5122 14 29.22 1.5 E-3 3C
Oxide1 20008 395 - - -
Poly1 19948 523 10.88 2.2 E-3 3C
Oxide2 7598 75 - - -
Poly2 15048 47 19.8 3.0 E-3 6C
Metal 4923 - 0.06 - 5T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #8
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 5580 145 - - 133 T
Poly0 4696 20 31.94 1.5 E-3 8C
Oxide1 20362 718 - - -
Poly1 19780 506 8.09 1.6 E-3 14 C
Oxide2 6133 531 - - -
Poly2 15450 82 16.18 2.5 E-3 10 C
Metal 5200 - 0.07 - 166 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #7
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6049 96 - - 41 T
Poly0 4880 - - - -
Oxide1 20400 597 - - -
Poly1 20100 580 8.21 1.7 E-3 8C
Oxide2 5281 226 - - -
Poly2 14706 500 10.47 1.5 E-3 11 C
Metal 5318 - 0.06 - 21 T

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #6
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 6213 252 - - 19 T
Poly0 5200 250 35.4 1.8 E-3 20 C
Oxide1 20151 210 - - -
Poly1 20220 450 12.74 2.6 E-3 5C
Oxide2 5230 160 - - -
Poly2 15650 75 17.35 2.7 E-3 5C
Metal 5540 - 0.06 - -

Process: PolyMUMPs Data Courtesy of MEMSCAP

 Run #5
100mm wafers
Standard Sheet
Thickness Deviation Resistance Resistivity Stress
(A) (A) (ohm/sq) (ohm-cm) (MPa)
Nitride 4940 75 - - 113 T
Poly0 5450 24 42.9 2.3 E-3 10 C
Oxide1 20800 - - - -
Poly1 20175 579 16.5 3.3 E-3 3C
Oxide2 5150 163 - - -
Poly2 16800 500 23.8 4.0 E-3 8C
Metal 5200 - 0.06 - 29.3

Process: PolyMUMPs Data Courtesy of MEMSCAP