Cargas
In-Plane and Out-Of-Plane MEMS Gyroscopes Based On Piezoresistive NEMS Detection 0% encontró este documento útilCharacterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within A Wafer-Scale Encapsulation Process 0% encontró este documento útilA Slot-Structure MEMS Gyroscope Working at Atmosphere With Tunable Electrostatic Spring Constant 0% encontró este documento útil3 Stability 0% encontró este documento útilA Single-Crystal Silicon Symmetrical and Decoupled MEMS Gyroscope On An Insulating Substrate 0% encontró este documento útilEmft 2 0% encontró este documento útil4.root Locus 0% encontró este documento útilEmft 3 0% encontró este documento útilEmft 4 0% encontró este documento útilDesign of A New Structure Quartz MEMS Gyroscope With High Sensitivity 0% encontró este documento útilA Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure 0% encontró este documento útil