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Example – Silicon Spiral Inductor
Nominal Design:
Spiral: 2.5T, W=15um, S=1.5um, Rad=60um
M6, 2um, = 2.8e7 S/m
Underpass: M5, 0.5um, = 2.8e7 S/m
Passivation
Stackup: M6
Passivation: 0.7um Oxide M5
r = 7.9
Oxide: 9.8um
r = 4.0
Substrate: 300um
Substrate
r = 11.9, = 10 S/m
Getting Started
3. Select the menu item Tools > Options > 3D Modeler Options.
1. Select Units: um
Create Substrate
To create the substrate:
1. Select the menu item Draw > Box
dX: 540.0, dY: 540.0, dZ: 300.0, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
Create Oxide
To create substrate:
1. Select the menu item Draw > Box
dX: 540.0, dY: 540.0, dZ: 9.8, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
Create Passivation
To create substrate:
1. Select the menu item Draw > Box
dX: 540.0, dY: 540.0, dZ: 0.7, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
Create Air
To create air:
1. Select the menu item Draw > Box
Create Ground
To create ground:
Select the menu item Draw > Rectangle
Using the coordinate entry fields, enter the box position
X: -270.0, Y: -270.0, Z: 0.0, Press the Enter key
Using the coordinate entry fields, enter the opposite corner of the base
rectangle:
dX: 540.0, dY: 540.0, dZ: 0.0, Press the Enter key
To set the name:
Select the Attribute tab from the Properties window.
For the Value of Name type: Ground
Click the OK button
To fit the view:
Select the menu item View > Fit All > Active View.
1. Name: PerfE_Ground
Hide Dielectrics
To hide the dielectrics:
1. Select the menu item Edit > Select All Visible
2. Select the menu item View > Hide Selection > All Views
Note: You can also select the object from the Model Tree
1. Select the menu item Draw > Sweep > Along Path
2. Click the OK button when the Sweep along path dialog appears
Create Underpass
To create underpass:
1. Select the menu item Draw > Box
dX: -75.0, dY: -15.0, dZ: -0.5, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
Create Via1
To create via:
1. Select the menu item Draw > Box
dX: -15.0, dY: -15.0, dZ: -0.8, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
Create Via2
To create via:
1. Select the menu item Draw > Box
dX: -15.0, dY: -15.0, dZ: -0.8, Press the Enter key
To set the name:
Select the Attribute tab from the Properties window.
For the Value of Name type: Via2
Click the OK button
1. To fit the view:
Select the menu item View > Fit All > Active View.
Create Feed
To create feed:
1. Select the menu item Draw > Box
dX: -22.0, dY: -15.0, dZ: 2.0, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
3. Properties Dialog
Click the OK button for all warning messages (Solving inside a solid with high
conductivity may require a large mesh)
dX: 450.0, dY: 450.0, dZ: 2.0, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
1. dX: 420.0, dY: 420.0, dZ: 2.0, Press the Enter key
2. Subtract Window
Create Extension 1
To create extension:
1. Select the menu item Draw > Box
dX: -53.0, dY: -15.0, dZ: 2.0, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
Create Extension 2
To create extension:
1. Select the menu item Draw > Box
dX: 64.0, dY: -15.0, dZ: 2.0, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
Create Source 1
To create source:
1. Select the menu item Draw > Rectangle
2. Using the coordinate entry fields, enter the box position
X: -142.0, Y: 7.5, Z: 1.0, Press the Enter key
3. Using the coordinate entry fields, enter the opposite corner of the base
rectangle:
dX: -15.0, dY: -15.0, dZ: 0.0, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
2. For the Value of Name type: Source1
3. Click the OK button
To fit the view:
1. Select the menu item View > Fit All > Active View .
Assign Excitation
To select the object Source:
1. Select the menu item Edit > Select > By Name
2. Select Object Dialog,
1. Select the objects named: Source1
2. Click the OK button
Note: You can also select the object from the Model Tree
To assign lumped port excitation
1. Select the menu item HFSS > Excitations > Assign > Lumped Port
2. Lumped Port : General
1. Name: p1,
2. Resistance: 50
3. Reactance: 0
4. Click the Next button
3. Lumped Port : Terminals
Number of Terminals: 1,
For T1, click the Undefined column and select New Line
Using the coordinate entry fields, enter the vector position
X: -157.0, Y: 0.0, Z: 1.0, Press the Enter key
1. Using the coordinate entry fields, enter the vertex
dX: 15.0, dY: 0.0, dZ: 0.0, Press the Enter key
2. Click the Finish button
Create Source 2
To create source:
1. Select the menu item Draw > Rectangle
2. Using the coordinate entry fields, enter the box position
X: 131.0, Y: 7.5, Z: 1.0, Press the Enter key
3. Using the coordinate entry fields, enter the opposite corner of the base
rectangle:
dX: 15.0, dY: -15.0, dZ: 0.0, Press the Enter key
To set the name:
1. Select the Attribute tab from the Properties window.
2. For the Value of Name type: Source2
3. Click the OK button
To fit the view:
1. Select the menu item View > Fit All > Active View .
Assign Excitation
To select the object Source:
1. Select the menu item Edit > Select > By Name
2. Select Object Dialog,
1. Select the objects named: Source2
2. Click the OK button
Note: You can also select the object from the Model Tree
To assign lumped port excitation
1. Select the menu item HFSS > Excitations > Assign > Lumped Port
2. Lumped Port : General
1. Name: p2,
2. Resistance: 50
3. Reactance: 0
4. Click the Next button
3. Lumped Port : Terminals
Number of Terminals: 1,
For T1, click the Undefined column and select New Line
Using the coordinate entry fields, enter the vector position
X: 146.0, Y: 0.0, Z: 1.0, Press the Enter key
1. Using the coordinate entry fields, enter the vertex
dX: -15.0, dY: 0.0, dZ: 0.0, Press the Enter key
2. Click the Finish button
Show All
To show all object
1. Select the menu item View > Show All > All Views
Boundary Display
To verify the boundary setup:
1. Select the menu item HFSS > Boundary Display (Solver View)
2. From the Solver View of Boundaries, toggle the Visibility check box for the
boundaries you wish to display.
Note: The background (Perfect Conductor) is displayed as the outer
boundary.
Note: The Perfect Conductors are displayed as the smetal
boundary.
Note: Select the menu item, View > Visibility to hide all of the
geometry objects. This makes it easier to see the boundary
3. Click the Close button when you are finished
Analysis Setup
Start: 0.1GHz
Stop: 20.0GHz
Step: 0.1GHz
Click the OK button
Save Project
To save the project:
1. In an Ansoft HFSS window, select the menu item File > Save As.
Analyze
Model Validation
To validate the model:
1. Select the menu item HFSS > Validation Check
Analyze
To start the solution process:
1. Select the menu item HFSS > Analyze
Solution Data
To view the Solution Data:
1. Select the menu item HFSS > Results > Solution Data
Create Reports
3. Traces Window:
1. Domain: Sweep
4. Function: dB
1. Name: Q11
2. Expression:
4. Domain: Sweep
3. Function: abs
1. Name: L11
2. Expression:
Type: -1/(2*pi*freq*
Category: Terminal Y Parameters
Quantity: Yt(p1,p1)
Function: im
Click the Insert Quantity into Expression button
Type: )
3. Click the Add button
4. Domain: Sweep
2. Quantity: Y11
3. Function: none
G S G
PEC Bridge
G S G
gap
G S G
Lumped
gap
Port
G S G
G S G
Via
Lumped Port Via
Ground Bridge