CMOS

Manufacturing
Process

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

CMOS Process

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

Circuit Under Design

VDD

VDD
M2

M4
Vout

Vin

M1

Vout2

M3

This two-inverter circuit (of Figure 3.25 in the text) will be

manufactured in a twin-well process.
Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

Circuit Layout

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

Process Flow
These slides only present only a couple of snapshots of the
manufacturing process for the circuits presented in the textbook.
For a complete overview of all 62 steps, please refer to:
http://tanqueray.eecs.berkeley.edu/~ehab/inv.html.
Credits for these pictures go to Ehab Hakeem, Prof. Andrew Neureuther
and the Simpl program.

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

Start Material
A

Starting wafer: n-type with

doping level = 10 13/cm3
* Cross-sections will be
shown along vertical line A-A

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

N-well Construction

(1) Oxidize wafer

(2) Deposit silicon nitride
(3) Deposit photoresist

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

N-well Construction

(4) Expose resist using n-well

mask

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

N-well Construction

(5) Develop resist

(6) Etch nitride and
(7) Grow thick oxide

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

N-well Construction

(8) Implant n-dopants (phosphorus)

(up to 1.5 m deep)

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

P-well Construction

Repeat previous steps

Digital Integrated Circuits

Manufacturing Process

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Grow Gate Oxide

0.055 m thin

Digital Integrated Circuits

Manufacturing Process

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Grow Thick Field Oxide

0.9 m thick

Uses Active Area mask

Is followed by
threshold-adjusting implants

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

Polysilicon layer

Digital Integrated Circuits

Manufacturing Process

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Source-Drain Implants

n+ source-drain implant
(using n+ select mask)

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

Source-Drain Implants

p+ source-drain implant
(using p+ select mask)

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

Contact-Hole Definition

(1) Deposit inter-level

dielectric (SiO2) 0.75 m
(2) Define contact opening
using contact mask

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

Aluminum-1 Layer

Aluminum evaporated
(0.8 m thick)
followed by other metal
layers and glass

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995

Advanced Metalization

Digital Integrated Circuits

Manufacturing Process

Prentice Hall 1995