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SENSOR SYSTEMS
NON-CONTACT MEASURING SYSTEM COMBINES
HIGH-RATE SCANNING WITH HIGHLY ACCURATE MEASUREMENT
PRE1033(4)
Laser Scan Micrometers
High scanning rate (3200 scans/sec) and high accuracy, non-contact measuring
systems. The LSM features a very high scanning rate which allows inspection of
small workpieces even if they are fragile, at a high temperature, in motion or
vibrating.
Features
0.005mm-diameter ultra-fine wires to 160mm- measurement tools and instruments, has established within its
diameter cylinders can be measured: Seamless business practises.
measurement range models
Improved resistance to IP64-level environments
A rich assortment of models for diverse measuring applications.
The LSM-500S can measure ultra-fine wires as thin as 0.005mm The measuring unit has been extensively developed to resist rough
in diameter to a resolution of 0.00001mm, and the LSM-516S can measurement environments. As a result, for example, it can operate
measure cylindrical workpieces with a diameter as large as 160mm. at an ambient temperature of 45°C. (IP64-level resistance is not
The LSM-9506 bench-top model combines a display section and guaranteed for the display unit and the LSM-9506.)
measurement section all in one unit. DIN-size compact panel-mounted display unit
Ultra-high scanning rate 3200 scans/sec (LSM-5200)
The incorporation of a sixteen-face polygonal mirror and a high- The LSM-5200 display unit is a compact DIN size, allowing it to be
precision motor now makes scanning at 3200 scans per second mounted in a panel so as to be suitable for mounting in a rack, etc.,
possible. This formidable capability is ideal, for example, for taking for use on production lines.
measurements on high-speed production lines or on vibrating Standard I/O output, analog output and RS-232C
workpieces. output interfaces
Certified accuracy over the entire measurement The LSM-5200/6200/6900 has a standard I/O and analog output
range interface to connect it to an operation controller or PLC used on a
The specified high accuracy over the entire measurement range production line. Also, every model has a standard RS-232C interface
is certified by the “Traceability System to the International for connection to personal computers or printers.
Standard” which Mitutoyo, as a leading manufacturer of precision
2
Principle Motor
Collimating
lens
Workpiece
Condenser lens
Amplifier
Motor driver
Polygonal
mirror
Photoelectric
Power source Semiconductor element
laser Photoelectric element (receiver)
(Reset signal generation)
MP Motor driving RS
pulse Clock pulse
A laser beam is directed at a polygonal mirror rotating at high speed in exact synchronism with highly stable pulses from the system clock.
The reflected beam is rotating clockwise as it sweeps across the input surface of a collimating lens but changes direction to be always
horizontal after the lens’ exit surface as it moves, or scans, downward. This horizontal beam enters the measuring space and, with no
workpiece present, reaches a receiver via a condensing lens to produce an output signal. When a simple workpiece (a cylinder, for example)
is put into the measuring space the beam will be interrupted for a time during its sweep and this time, as indicated by clock pulses occurring
while the receiver signal is absent, is proportional to the workpiece dimension in the downward direction.
Each transition between the receiver detecting the beam and then not detecting the beam, or vice versa, is called an ‘edge’ and marks
the start and/or end of measuring sections called ‘segments’, so that the differences in position of these edges define the length of each
segment. The edges and segments generated by a workpiece are numbered sequentially by the instrument and are used when writing
programs to extract the required dimensional data.
3
Applications
Diameter
Dia.
Reference
Out of edge
roundness
Reference
edge
Reference
edge
Gap
Reference edge
4
Measurement Measurement of outer Measurement of form
of tape width diameter of optical connector
and ferrule
Optimal for Inspecting the Outside Diameter of Pin Gages or Plug Gages
The use of world-class laser scan micrometer LSM-902/6900 along with an adjustable workstage allows high-
accuracy measurement inspection of the outside diameter of pin gages or plug gages.
This LSM is also capable of data output to an external device such as a personal computer from the display
unit.
(Measurement data can be stored easily in cells on EXCEL by using the Mitutoyo input tool.)
n Major Specifications
Measuring range: 0.1 mm to 25.0 mm in diameter
Resolution: 0.01 μm
Linearity: ±0.5 μm
Repeatability: ±0.05 μm
5
All models of Laser Scan Micrometer
Measuring Units
Measuring range Model Refer to...
LSM-500S
0.005 - 2mm
(.0002" - .08") Page 10
LSM-501S
0.05 - 10mm
(.002" - .4") Page 12
FDA Class II
LSM-503S
0.3 - 30mm
(.012" - 1.18") Page 14
LSM-506S
1 - 60mm
(.04" - 2.36") Page 16
LSM-512S
1 - 120mm
(.04" - 4.72") Page 18
LSM-516S
1 - 160mm
(.04" - 6.30") Page 20
6
Measuring Unit (Factory-set package)
Measuring range Model Refer to...
LSM-902/6900
0.1 - 25mm
(.004” - 1.0”) Page 8
LSM-9506
0.5 - 60mm
(.02" - 2.36") Pages 22
Measuring unit / integrated-display
model for bench-top use only
Display Units
Type Model Refer to...
LSM-6200
Multi-function
(Power Supply Page 29
100V - 240V AC)
LSM-5200
Compact
(Power Supply Pages 28
+24V DC)
7
LSM-902/6900
Ultra-High Accuracy Measuring Unit
† Suitable for pin and plug gage measurements.
† Wide measuring range of ø 0.1 mm to ø 25 mm
† Provides ultra-high accuracy with a linearity of ±0.5 µm over the entire measurement range and ±(0.3+0.1∆D) µm in the narrow range.
† Ultra-high repeatability of ±0.05 µm
Factory-set-package
8
Optional accessories
Dimensions
Unit: mm (inch) 02AGD180
90 (3.54") 15 (.59") Calibration gage set (ø1mm, ø25mm)
50 (1.97")
10.5 (.41")
35 (1.38")
22 (.87")
56 (2.20") 7 (.28")
70 (2.76")
15.5 (.61")
60 (2.36") 60 (2.36")
200 (7.87") 120 (4.72") 100 (3.94")
02AGD270
70 (2.76")
170 (6.69")
8 (.31")
Workstage
(1.97")
50
5 (.20")
335 (13.19")
Power Supply
100V - 240V AC
125 (4.92")
134 (5.28")
02AGD280
Adjustable Workstage
8.2 (.32")
Approx. 12º
276.4 (10.88")
250 (9.84")
Cable space
80 (3.15")
9
LSM-500S
Ultra-Fine Wire Measuring Unit
† Permits measurements starting from ø5µm
† Provides ultra-high accuracy with a linearity of ±0.3µm over the entire measurement range (5µm to 2mm).
† Ultra-high repeatability of ±0.03µm
Specifications
Model LSM-500S
Order No. 544-532
Acceptable standard of laser IEC, FDA
Measuring range*1 0.005 - 2mm (.0002" - .08")
Resolution (selectable) 0.00001 - 0.01mm (.000001" - .0005")
Repeatability*2 ±0.03µm (±1.1µinch)
Linearity at 20°C*3 ±0.3µm (±12µinch)
Positional error*4 ±0.4µm (±16µinch)
Measuring region*5 1x2mm (.04"x.08")
Scanning rate 3200 scans/s
Laser wavelength 650nm, Visible*6
Laser scanning speed 76m/s (3000”/s)
Operating temperature 0°C - 40°C
Operating humidity 35 - 85% RH (with no condensation)
Water/Dust protection grade Conforming to IP64*7
Mass Measuring unit: 1.0kg (2.2lbs.),
Signal cable: 0.5kg (1.1lbs.)
*1: If a workpiece is transparent or if the dual-type add-on unit that is an optional accessory
for the LSM-6200 display unit is used, measurement range will be set to between 0.05mm
(.002") to 2mm (.08"). In addition, if the edge measurement is selected for 1 to 255 edges or
if the automatic workpiece detecting function is on, measuring range will be set to between
0.1mm (.004") to 2mm (.08").
*2: Determined by the value for ±2σ at the measurement of ø2mm workpiece with 0.32sec.
interval (1024-time avarage).
*3: At the center of the measuring region. LSM-6200 display unit
*4: An error due to workpiece shift either in the optical axis direction or in the scanning (optional)
direction.
*5: The area given by "measuring range on the optical axis" x "measuring range in the scanning
direction".
*6: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW)
*7: The protection level provided for the interior. If the workpiece or glass of the measuring unit
window is soiled by water or dust, the unit may malfunction.
10
Dimensions
Unit: mm (inch)
17.5 (.69")
ø3.1 hole,
10.5 (.41")
depth 6
M3, depth 6 (x4)
(Measuring
position)
(1.57")
14.5 (.57") 9.5 (.37")
40
(.61")
15.5
11 (.43") 11 (.43")
Measuring
position
Signal cable
(Cable length: 5m)
29.5 (1.16")
Cable space (1.26")
34 (1.34")
Working
distance
2 (.08")
181 (7.13")
A
A : Bottom view
Optional accessories
02AGD110
Calibration gage set (ø0.1mm, ø2.0mm)
02AGD200
Wire guiding pulley 02AGD220
Air-screen covers
11
LSM-501S
Fine Wire Measuring Unit
† Provides ultra-high accuracy with a linearity of ±0.5µm over the entire measurement range (0.05mm to 10mm) and ±(0.3+0.1∆D)µm in the narrow range.
† Ultra-high repeatability of ±0.04µm
Specifications
Model LSM-501S
Order No. 544-534
Acceptable standard of laser IEC, FDA
Measuring range 0.05 - 10mm (.002" - .4")
Resolution (selectable) 0.00001 - 0.01mm (.000001" - .0005")
Repeatability*1 ±0.04µm (±1.5µinch)
Linearity Entire range ±0.5µm (±20µinch)
at 20°C*2 Narrow range ±(0.3+0.1∆D)µm
Positional error*3 ±0.5µm (±20µinch)
Measuring region*4 2 x 10mm at ø0.05 - 0.1mm
(.08" x .4" at ø.002" - .004")
4 x 10mm at ø0.1 - 10mm
(.16" x .4" at ø.004" - .4")
Scanning rate 3200 scans/s
Laser wavelength 650nm, Visible*5
Laser scanning speed 113m/s (4450”/s)
Operating temperature 0°C - 40°C
Operating humidity 35 - 85% RH (with no condensation)
Water/Dust protection grade Conforming to IP64*6
Mass Emission unit: 0.7kg (1.54lbs.),
Reception unit: 0.4kg (.88lbs.),
Base: 0.3kg (.66lbs.), Signal cable: 0.5kg (1.1lbs.)
*1: Determined by the value for ±2σ at the measurement of ø10mm workpiece with 0.32sec. LSM-6200 display unit
interval (512-time avarage). (optional)
*2: At the center of the measuring region.
*3: An error due to workpiece shift either in the optical axis direction or in the scanning
direction.
*4: The area given by "measuring range on the optical axis" x "measuring range in the scanning
direction".
*5: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW)
*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit
window is soiled by water or dust, the unit may malfunction.
12
Dimensions
50 (1.97") 9.5 9.5 Unit: mm (inch)
ø3.1 hole, depth 6
(Measuring position) (.37") (.37")
18.5 (.73")
22 (.87")
6 (.24") M3 (x8) 10.5
(.41") M4, depth 8 (x3)
ø3.1 hole,
depth 6
42 (1.65")
53 (2.09")
64 (2.52")
(1.18")
30
(1.52")
(.61")
Measuring position
38.5
15.5
40 150 (5.91") 40
(1.57") (1.57") 9.5 (.37")
70 (2.76") min. 230 (9.06") 14.5
(1.59")
40.5
(.57")
Cable space 123 (4.84") 68 (2.68") 39
100 (3.94") max. (1.54") 40 (1.57") ø3.1 hole,
Signal cable depth 6
(Cable 34 (1.34") 34 (1.34") Measuring
length: 5m) region
8 (.31") 8 (.31") M4, depth 8 (x3)
110 (4.33")
4
(.16")
To Reception Unit
84 (3.31")
57.5
10
Relay
cable Emission Base
Unit
(.79")
A: Bottom view
(Main unit detached
A from base)
Reception Unit
Optional accessories
02AGD210 02AGD400
02AGD120
Wire guiding pulley Adjustable workstage
Calibration gage set (ø0.1mm, ø10mm)
02AGD230
Air-screen covers 02AGD440 Center support*
02AGD270 02AGD450 Adjustable V-block*
Workstage 957608 Air cleaner for air-screen cover
02AGC150A Extension relay cable 1m
02AGN780A Extension signal cable 5m
02AGN780B Extension signal cable 10m
02AGN780C Extension signal cable 15m
*Use with an adjustable workstage.
13
LSM-503S
Standard Measuring Unit
† General-purpose type with a measurement range of 0.3mm to 30mm.
† Provides high accuracy with a linearity of ±1.0µm over the entire measurement range and ±(0.6+0.1∆D)µm in the narrow range.
† Excellent repeatability of ±0.1µm
Dia.
Reference
Out of edge
roundness
Specifications
Model LSM-503S
Order No. 544-536
Acceptable standard of laser IEC, FDA
Measuring range 0.3 - 30mm (.012" - 1.18")
Resolution (selectable) 0.00002 - 0.1mm (.000001" - .005")
Repeatability*1 ±0.1µm (±3.9µinch)
Linearity Entire range ±1.0µm (±40µinch)
at 20°C*2 Narrow range ±(0.6+0.1∆D)µm
Positional error*3 ±1.5µm (±60µinch)
Measuring region*4 10 x 30mm (.4" x 1.18")
Scanning rate 3200 scans/s
Laser wavelength 650nm, Visible*5
Laser scanning speed 226m/s (8900”/s)
Operating temperature 0°C - 40°C
Operating humidity 35 - 85% RH (with no condensation)
Water/Dust protection grade Conforming to IP64*6
Mass Emission unit: 1.1kg (2.42lbs.),
Reception unit: 0.6kg (1.32lbs.),
Base: 0.5kg (1.1lbs.), Signal cable: 0.5kg (1.1lbs.)
*1: Determined by the value for ±2 at the measurement of ø30mm workpiece with 0.32sec.
interval (1024-time avarage).
*2: At the center of the measuring region.
*3: An error due to workpiece shift either in the optical axis direction or in the scanning LSM-6200 display unit
direction. (optional)
*4: The area given by "measuring range on the optical axis" x "measuring range in the scanning
direction".
*5: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW)
*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit
window is soiled by water or dust, the unit may malfunction.
14
Dimensions
ø3.1 (.12") hole Unit: mm (inch)
18.5 (.73")
50 (1.97")
(Measuring position) M3 (x8) 6 (.24")
22 (.87")
(.41")
10.5
(1.61")
M4, depth 8 (x3)
68 (2.68")
41
(2.09")
(1.65")
For mounting base
53
42
(2.24")
(.61")
57
15.5
90 (3.54")
Cable 130 (5.12")
space M4,
350 (13.78") max. depth 8 (x3)
170 (6.69") 80 (3.15") 50 (1.97") 55 (2.17") 42 For mounting
Reception base
8 (.31") 10 (.39") 8 (.31") Unit (1.65")
Emission Unit Measuring ø3.1, depth 6
region
30 (1.18")
(Reference hole)
150 (5.91")
80 (3.15")
57.5 (2.26")
90 (3.54")
110 (4.33")
(.47")
To Reception Unit
12
Relay Base
(.22")
5.5
(.79")
cable
20
Optional accessories
02AGD130 02AGD400 02AGD270
Calibration gage set (ø1.0mm, ø30mm) Adjustable workstage Workstage
02AGD240
Air-screen covers 02AGD440 Center support*
02AGD450 Adjustable V-block*
957608 Air cleaner for air-screen covers
02AGC150A Extension relay cable 1m
02AGC150B Extension relay cable 3m
02AGC150C Extension relay cable 5m
02AGN780A Extension signal cable 5m
02AGN780B Extension signal cable 10m
02AGN780C Extension signal cable 15m
02AGN780D Extension signal cable 20m
*Use with an adjustable workstage.
15
LSM-506S
Wide Range Measuring Unit
† General-purpose type with a measurement range of 1mm to 60mm.
† Provides high accuracy with a linearity of ±3µm over the entire measurement range and ±(1.5+0.5∆D)µm in the narrow range.
† Excellent repeatability of ±0.36µm
Gap
Specifications
Model LSM-506S
Order No. 544-537 544-538
Acceptable standard of laser JIS IEC, FDA Reference
Measuring range 1 - 60mm (.04" - 2.36") edge
Resolution (selectable) 0.00005 - 0.1mm (.000002" - .005")
Repeatability*1 ±0.36µm (±14µinch)
Linearity Entire range ±3µm (±120µinch)
at 20°C*2 Narrow range ±(1.5+0.5∆D)µm
Positional error*3 ±4µm (±160µinch)
Measuring region*4 20 x 60mm (.8" x 2.36")
Scanning rate 3200 scans/s
Laser wavelength 650nm, Visible*5
Laser scanning speed 452m/s (17800”/s)
Operating temperature 0°C - 40°C
Operating humidity 35 - 85% RH (with no condensation)
Water/Dust protection grade Conforming to IP64*6
Mass Emission unit: 1.4kg (3.08lbs.),
Reception unit: 0.8kg (1.76lbs.),
Base: 0.8kg (1.76lbs.), Signal cable: 0.5kg (1.1lbs.)
16
Dimensions
100 (3.94") Unit: mm (inch)
ø3.1 hole
(Measuring 50 (1.97")
18.5 (.73")
position) M3 (x12) 7 (.28")
22
(.87") M5, depth 10 (x3)
(.41")
10.5
(2.48")
For mounting base
63
(1.65")
(2.28")
(2.76")
42
58
70
ø3.1, depth 6
(.61")
9.5 9.5
121 (4.76")
15.5
174.5 (6.87")
space 700 (27.56") max.
(Cable Reception
length: 5m) 185 (7.28") 163 (6.42") 110 (4.33") 82 14.5 9.5
Unit 42 (1.65") M5, depth 10 (x3)
Measuring 8 (.31") (3.23") (.57") (.37") For mounting base
8 (.31") 20
Emission Unit region
(.79")
97 (3.82")
110 (4.33")
60
130 (5.12")
ø3.1, depth 6
66 (2.6")
162 (6.38")
(Reference hole)
12
20
Optional accessories
17
LSM-512S
Ultra-Wide Range Measuring Unit
† General-purpose type with a wide measurement range of 1mm to 120mm.
† Provides high accuracy with a linearity of ±6µm over the entire measurement range and ±(4.0+0.5∆D)µm in the narrow range.
† Excellent repeatability of ±0.8µm
Specifications
Model LSM-512S Diameter
Order No. 544-540
Acceptable standard of laser IEC, FDA
Measuring range 1 - 120mm (.04" - 4.72")
Resolution (selectable) 0.0001 - 0.1mm (.000005" - .005")
Repeatability*1 ±0.8µm (±32µinch)
Linearity Entire range ±6µm (±240µinch)
at 20°C*2 Narrow range ±(4.0+0.5∆D)µm
Positional error*3 ±8µm (±320µinch)
Measuring region*4 30 x 120mm at ø1 - 120mm
(1.2" x 4.72" at ø.04" - 4.72")
Scanning rate 3200 scans/s
Laser wavelength 650nm, Visible*5
Laser scanning speed 904m/s (35590"/s)
Operating temperature 0°C - 40°C
Operating humidity 35 - 85% RH (with no condensation)
Water/Dust protection grade Conforming to IP64*6
Mass Emission unit: 3.0kg (6.6lbs.),
Reception unit: 1.2kg (2.64lbs.),
Base: 1.8kg (3.96lbs.), Signal cable: 0.5kg (1.1lbs.)
*1: Determined by the value for ±2σ at the measurement of ø120mm workpiece with 0.32sec.
interval (1024-time avarage).
*2: At the center of the measuring region. LSM-6200 display unit
*3: An error due to workpiece shift either in the optical axis direction or in the scanning (optional)
direction.
*4: The area given by "measuring range on the optical axis" x "measuring range in the scanning
direction".
*5: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW)
*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit
window is soiled by water or dust, the unit may malfunction.
18
Dimensions M4 (x8)
200 (7.87")
ø3.1 hole Unit: mm (inch)
100 (3.94") (Measuring position)
(.31")
85 (3.35")
8
(1.89")
(3.15")
(2.68")
For mounting base
48
80
68
(.75")
144 (5.67")
7 (.28") (Reference hole)
18.5 (.73")
(.75") (.31")
312 (12.28") 88
150 (5.91") 400 (15.75") (3.46") 150 (5.91")
Measuring position
70 (2.76") min. 700 (27.56")
272 (10.71") 321 (12.64") 107 Reception
Signal cable Cable Unit 19 8
256 (10.08")
700 (27.56") max. (4.21")
(Cable space (.75") (.31")
length: 5m) 48 (1.89")
Emission 190 (7.48") 131 (5.16") M6, depth 12 (x3)
Unit 9 (.35") Measuring 9 (.35") For mounting base
30
region
(1.18")
146 (5.75")
162 (6.38")
192 (7.56")
84 (3.31")
(Reference hole)
(.35")
Base
(1.18")
9
96 96 263 137 52
30
Relay cable
(3.78") (3.78") (10.35") (5.39") (2.05") A
462 (18.19") 238 (9.37")
M6, depth 12, A: Bottom view
M6, depth 12, ø5 through hole (x3) ø5 through hole (x3) (Main unit detached
For mounting side plate (Same in the back) For mounting side plate from base)
(Same in the back)
Optional accessories
02AGD260
02AGD150
Air blow cover
Calibration gage set
(ø20mm, ø120mm)
19
LSM-516S
Ultra-Wide Range Measuring Unit
† General-purpose type with a wide measurement range of 1mm to 160mm.
† Provides high accuracy with a linearity of ±7µm over the entire measurement range and ±(4.0+2.0∆D)µm in the narrow range.
† Excellent repeatability of ±1.4µm
Specifications
Model LSM-516S Diameter
Order No. 544-542
Acceptable standard of laser IEC, FDA
Measuring range 1 - 160mm (.04" - 6.30")
Resolution (selectable) 0.0001 - 0.1mm (.000005" - .005")
Repeatability*1 ±1.4µm (±55µinch)
Linearity Entire range ±7µm (±276µinch)
at 20°C*2 Narrow range ±(4.0+2.0∆D)µm
Positional error*3 ±8µm (±320µinch)
Measuring region*4 40 x 160mm at ø1 - 160mm
(1.57" x 6.30" at ø.04" - 6.30")
Scanning rate 3200 scans/s
Laser wavelength 650nm, Visible*5
Laser scanning speed 603m/s (23740"/s)
Operating temperature 0°C - 40°C
Operating humidity 35 - 85% RH (with no condensation)
Water/Dust protection grade Conforming to IP64*6
Mass Emission unit: 3.0kg (6.6lbs.),
Reception unit: 1.2kg (2.64lbs.),
Base: 1.8kg (3.96lbs.), Signal cable: 0.5kg (1.1lbs.)
*1: Determined by the value for ±2σ at the measurement of ø160mm workpiece with 0.32sec.
interval (1024-time avarage).
*2: At the center of the measuring region. LSM-6200 display unit
*3: An error due to workpiece shift either in the optical axis direction or in the scanning (optional)
direction.
*4: The area given by "measuring range on the optical axis" x "measuring range in the scanning
direction".
*5: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW)
*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit
window is soiled by water or dust, the unit may malfunction.
20
Dimensions 200 ø3.1 hole (Measuring position)
Unit: mm (inch)
100 8-M4
20.5
8
100
120
M6, depth 12 (x3)
74
For mounting base
37
9 10
ø3 hole, depth 6
136
(Reference hole)
350 250
13
170 600 110 41 8
70 min. 880
400
Cable
space
200 200 Measuring
position
200
8.7 40 8.7 41 8
Measuring
region
88
208
160
208
224
249
10
218
25
Optional accessories
02AGC150A Extension relay cable 1m
02AGD300 02AGC150B Extension relay cable 3m
Calibration gage set 02AGC150C Extension relay cable 5m
(ø20mm, ø160mm) 02AGN780A Extension signal cable 5m
02AGN780B Extension signal cable 10m
02AGN780C Extension signal cable 15m
02AGN780D Extension signal cable 20m
21
LSM-9506
Bench-top Type with Display Unit
† With a design that integrates the display section and measuring section into one unit,
this instrument is best suited for making bench-top measurements in an inspection room.
† A statistical calculation function is provided.
† Standard RS-232C and SPC output interfaces are provided as standard.
Dimensions
150 (5.9") 10 (.39")
100 (3.94")
ø3.1 (Measurement position) 50 (1.97")
10 (.39")
80 (3.15")
60 (2.36")
22
Cable
space
12-M3
(.87")
Unit: mm (inch)
100 (3.94")
120 (4.72")
180 (7.07")
83 97
(3.27") (3.82")
382 (15.04") 180 (7.09") 85
(3.35")
647 (25.47")
365 (14.37") 100 100 82 40 (1.57") 52.5 (2.07")
(3.94") (3.94") (3.23") 25 (.9
11 (.43") 7")
10 8 (.31")
(.39")
60 (2.36")
202 (8.39")
213 (8.39")
(3.86")
8 (.31")
98
Measuring
region
(.43") (2.05")
52
11
22
Optional accessories
23
Optional accessories for Laser Scan Micrometer
Adjustable Workstages
† Aids in measuring workpiece diameter by means of up/down and right/left slide adjustments.
† Optimum for quality control of precision shafts, rollers, pin gages, etc.
For LSM-902/6900
Unit: mm (inch)
measuring
62 (2.44")
Sliding table
range 35 (1.37)
(1.96")
Overall travel 315 (12.40")
50
(including horizontal
adjustment 130 (5.11))
(1.08")
Horizontal clamp
27.5
Specifications 180 (7.08")
LSM-902 Up/Down adjustment wheel
Order No. 02AGD280
(2.28") (5.03")
127.8
Application LSM-902
Horizontal adjustment 130mm (5.12")
Vertical adjustment
58
47 (1.85")
range 70 (2.75")
From center of
range 60 (2.36)
Mass 0.8kg (1.8lbs.)
measuring
•V-block (02AGD420) x 2pcs.
Standard accessories •Workpiece stop (02AGD430)
For LSM-501S
Unit: mm (inch)
Sliding table
Horizontal
clamp Form center of
measuring range
140 (5.51")
55 (2.17")
18.5 (1.2")
Base
50 (x2pcs.)
Specifications Overall travel 315 (12.40")
(including horizontal (1.97") 26 (1.02")
adjustment 130 (5.11)) 230 (9.06")
Order No. 02AGD400
180 (7.09") 34 (1.34") Up/Down adjustment wheel
Application LSM-501S
Emission Unit From center of
Horizontal adjustment 130mm (5.12") measuring range
138.8 (5.46")
144.8 (5.7")
Reception
Unit
•V-block (02AGD420) x 2pcs. 40 150 (5.91") 40
Standard accessories
6 (.24")
24
For LSM-503S
Unit: mm (inch)
460 (18.11")
Sliding table
180 (7.09")
Horizontal clamp Vertical clamp
Overall travel 505 (19.88")
(including horizontal adjustment 200 (7.87")) 26 (1.02")/50 (1.97")*
From center of Up/Down
300 (11.81") measuring range
adjustment wheel
Emission Unit
Specifications
167 (6.57")
178 (7.01")
(3.84")
Order No. 02AGD490
adjustment
97.5
Vertical
Application LSM-503S
300 (11.81") Reception Unit
Horizontal adjustment 200mm (7.87") 90
(43")
11
Standard Accessories
V-blocks Workpiece stop
øD Workpiece having
ø10mm (.39") co-axial steps
Calibration gage
mounting hole ød
6mm
(1.38")
(.24")
35
H
20 27
L2 L1 (.78") (1.06")
Unit: mm (inch)
Order No. 02AGD420 Order No. 02AGD430
øD max. 30 (1.18")* Mass 0.05kg
ød max. 30 (1.18")*
D - d max. 25 (.98")**
H 25.5 (1")
L1 27 (1.06")
L2 20 (.79")
Mass 0.03kg
Calibration gages to be used • ø0.1mm • ø1mm • ø10mm • ø30mm
*10 (.39") for LSM-501S **25 (.98") for LSM-902
25
Optional accessories for Laser Scan Micrometer
Adjustable Workstages
† Aids in measuring workpiece diameter by means of up/down and right/left slide adjustments.
† Optimum for quality control of precision shafts, rollers, pin gages, etc.
For LSM-506S
Unit: mm (inch)
640 (25.2")
Sliding table
200 (7.87")
Horizontal clamp Vertical clamp
Overall travel 745 (29.33") 26 (1.02")/50 (1.97")*
(including horizontal adjustment 300 (11.81"))
From center of
440 (17.32") measuring range Up/Down
adjustment wheel
Specifications Emission Unit
202 (7.95")
213 (8.39")
(4.57")
adjustment
116
Application LSM-506S
Vertical
180 (7.09")
120 (4.72")
Sliding table
Specifications
Order No. 02AGD370 02AGD680
Application LSM-9506 Overall travel 545 (21.46")/
745 (29.33")* Vertical
Horizontal adjustment 200mm (7.87") 300mm (11.81") (Horizontal adjustment 200 (7.87")/ Horizontal clamp clamp
300 (11.81")*)
Vertical adjustment 45mm (1.77") From center
340 (13.39")/440 (17.32")*
Maximum table loading 2.0kg (4.4lbs.) 5.0kg (11lbs.) of measuring Up/Down adjustment
adjustment
range
106 (4.17")
wheel
Vertical
26
Standard Accessories
V-blocks Unit: mm (inch)
Order No. 02AGD550 02AGD560 02AGD570
øD Workpiece having
ø10mm (.39") co-axial steps øD max. 60 (2.36") 60 (2.36") 60 (2.36")
Calibration gage
mounting hole ød ød max. 60 (2.36") 30 (1.18") 30 (1.18")
6mm
(.24") D - d max. 30 (1.18") 50 (1.97") 50 (1.97")
H 39 (1.54") 45 (1.77") 45 (1.77")
H
Optional accessories
Adjustable V-blocks Center Supports
• Optional accessories for adjustable workstages. • Optional accessories for adjustable workstages.
L3
L4 A (Horizontal stroke)
Up/down wheel
W
W
H
H1
A (Vertical stroke)
H2
Sliding knob
H3
Specifications Specifications
Order No. 02AGD450 02AGD590 Order No. 02AGD440 02AGD580
Application Adjustable workstage for Adjustable workstage for Application Adjustable workstage for Adjustable workstage for
LSM-501S (02AGD400), LSM-506S (02AGD520), LSM-501S (02AGD400), LSM-506S (02AGD520),
Adjustable workstage for Adjustable workstage for Adjustable workstage for Adjustable workstage for
LSM-902 (02AGD280), LSM-9506 (02AGD680) LSM-902 (02AGD280), LSM-9506 (02AGD680)
Adjustable workstage for Adjustable workstage for
LSM-503S (02AGD490) LSM-503S (02AGD490)
Vertical adjustment (A) 20mm (.79") 35mm (1.38") Point angle 60° 60°
Maximum workpiece 30mm (1.18") 60mm (2.36") Maximum workpiece 110mm (4.33") 315mm (12.4")
diameter length on 02AGD400/02AGD280 on 02AGD520
Mass 0.1kg 0.2kg 230mm (9.06") on 02AGD490 on 02AGD680
Horizontal adjustment (A) 5mm (.2") or more 10mm (.39") or more
Center point clamping 1.1kgf 3.2kgf
force
Mass 0.18kg (.4lbs.) 0.85kg (1.87lbs.)
27
LSM-5200
Compact (Panel-mount) Type Display Unit
† Panel-mount type (with dimensions conforming to DIN standards) allows easy system integration.
† Capable of calculating mean, maximum, minimum, and range (maximum - minimum).
† Segment measurement (7 segments max.) or edge measurement (1 to 255 edges) can be selected.
† USB2.0, RS-232C and I/O-Analog interfaces are provided as standard.
† Arithmetical average or moving average can be selected.
† GO/±NG judgment function.
Power Supply
24V DC
(2.68")
68
*240.3+(t-0.6) [9.46"+(t-.024")]
138 (5.43")
Rear view
0 )
(2.68 +.028"
68 +0.7
0
Specifications
Model LSM-5200
Order No. 544-047
Display 9-digit LED (for measurement) & 8-digit LED (sub-display)
Segment designation Seg.1 to Seg.7 (Seg.1 - Seg.3 for transparent objects)
Edge designation 1 to 255 edges can be detected*1
Averaging times*2 Arithmetical average: per 1 to 2048, moving average: per 32 to 2048
GO/±NG judgment Nominal value ±tolerance setting, upper & lower limits setting
Measurement mode Waiting, single measurement, continuous measurement
Statistical calculation Available when connecting an external PC via the RS-232C or USB interfaces
Power supply +24V DC ±10%, 1A
Data output USB2.0, RS-232C and I/O-Analog interfaces
Functions (See page 30.)
Operating temperature 0°C - 45°C
Operating humidity 35 - 85% RH (with no condensation)
Mass 1.4kg (3.08lbs.)
*1: With the LSM-500S the measuring range will be set to between 0.1 and 2mm if edge measurement is selected for 1 to 255 edges or if the automatic workpiece detecting function is on.
*2: With the LSM-500S the number of scans will be limited to between 16 and 2048 for both arithmetical and moving averages if the ultra-fine wire measurement function is on.
28
LSM-6200
Multi-function Type Display Unit
† With a dual-display design setup values can be continuously monitored. Also, two measurement value
items can be displayed on the sub-display with the simultaneous measurement function.
† Either segment measurement (7 segments max.) or edge measurement (1 to 255 edges) can be
selected.
† RS-232C and I/O-Analog interfaces are provided as standard.
† A statistical calculation function and abnormal data eliminating function are provided.
Dimensions
335 (13.19")
Unit: mm (inch)
125 (4.92")
134 (5.28")
Power Supply
8.2 (.32")
Approx. 12º
100V - 240V AC
276.4 (10.88")
250 (9.84")
80 (3.15")
Cable
space
Specifications
Model LSM-6200
Order No. 100/110V AC 544-071C 544-072C
(Order no. suffix 120V AC 544-071A 544-072A
denotes the AC
power cord type 220/230V AC 544-071D 544-072D
equipped.)
240V AC 544-071E 544-072E
240V AC † 544-071F 544-072F
Type mm inch/mm
Display 16-digit fluorescent tube (for measurement) & 11-digit fluorescent tube (sub-display)
Segment designation Seg.1 to Seg.7 (Seg.1 - Seg.3 for transparent objects)
Edge designation 1 to 255 edges can be detected*1
Averaging times*2 Arithmetical average: per 1 to 2048, moving average: per 32 to 2048
GO/±NG judgment Nominal value ±tolerance setting, upper & lower limits setting, multi-limit setting
Measurement mode Waiting, single measurement, continuous measurement
Statistical calculation Maximum measurement (MAX), minimum measurement (MIN), mean, range (MAX-MIN), standard deviation (σ)
Power supply 100 - 240V AC ±10%, 50/60Hz, 40VA
Data output (as standard) Via RS-232C and I/O-Analog interfaces
Functions (See page 30.)
Operating temperature 0°C - 45°C
Operating humidity 35 - 85% RH (with no condensation)
Mass 5kg (11lbs.)
†For Australia
*1: With the LSM-500S the measuring range will be set to between 0.1 to 2mm if the edge measurement is selected for 1 to 255 edges or if the automatic workpiece detecting function is on.
*2: With the LSM-500S the number of scans will be limited to between 16 and 2048 for both the arithmetical and moving averages if the ultra-fine wire measurement function is on.
29
LSM-5200/6200/6900/9506 Functions
Seg.5
g.1
Se g.3
Se
Se g.6
Se
g.7
Sample Measurement
On a sample measurement the number of measurements will be defined (in
the range of 2 to 999) in advance. From this sample measurement various Automatic Measurement using Laser scanning direction
calculation results (mean, maximum, minimum, and range) can be derived. Edges Edge 1
These measurements can be used for runout measurements on a revolving The edges created by scanning a workpiece can Pin 1
Edge 2
workpiece and simplified cylindricity measurements. be used to program an LSM. A maximum of 127 Edge 3
Edge 4
workpiece features, and 127 of the spaces between Pin 2
Edge 5
these features, can be used which involves a total of Edge 6
255 edges. This is most useful for measuring such Pin 3
Edge 7
things as IC chip leads or connector pins that are Pin 126
Edge 253
approximately equally spaced. This method cannot Edge 254
Edge 256
30
External trigger signal input* *Not available for LSM-5200 Data Output
By supplying a contact signal to the footswitch connector at the rear panel Every model has a standard RS-232C interface unit, allowing data to be
of the LSM-6200/6900/9506, the measurement can be triggered. output to an external PC or printer.
The LSM-5200/6200 has the standard I/O-Analog output interface that
Abnormal Data Elimination allows the LSM to be connected to a sequencer, etc. The SPC (Digimatic
If a piece of data significantly exceeds the tolerance limit because the Code) output interface is standard with the LSM-9506, allowing for easy
workpiece or measuring unit is contaminated by a water droplet, oil construction of a quality control system. With the LSM-6200 there are
droplet, or dust, the piece of data will be automatically removed by this additional means of data output, including SPC, BCD, and GP-IB output
function. interfaces, which can be incorporated.
Data Output Interval Setting Multi-Limit Judgment* *Not available for LSM-5200
By setting an interval (between 1 and 999 seconds) to continuous In addition to +NG, GO, and -NG judgment criteria limit values from Limit
measurement in advance, data output will take place at each specified 1 to Limit 6 can also be set. If an optional 2nd I/O-Analog interface unit
period of time. (02AGC880) is used with the LSM-6200/6900/9506, seven-step judgment
signals can be output to external devices to support GO/NG judgment.
Statistical Calculation +NG
Limit 6
With this function, multiple measurements OK5
Limit 5
are taken from the same kind of workpiece, OK4
statistical values are calculated from the OK3
Limit 4
measurement results and quality evaluation is A
OK2
Limit 3
executed for each lot. Limit 2
OK1
Limit 1
• Example of measuring a stepped cylinder -NG
using the statistical calculation function.
-0. 0
+
ø6
7
0h
Micrometer unit, and to output the data. This function can be used to
-0. 0
1
+
B
2
ø1
C
2
01
-0. 0
+
31
LSM-5200/6200/6900/9506 Data I/O Specifications
RS-232C Interface
Allows the LSM to communicate with external devices via RS-232C Connections
(conforming to the EIA standard) serial signals. Depending on the basic
(1) Connecting the RS-232C interface to a device specified as a terminal (DTE)
setup this interface can be used as a printer port.
Example 1: Flow control method (handshake method controlled by
Pin assignment of the connector CTS, DSR, DTR, and RTS signals)
Matching plug: D-sub 9pin (female) PC (PC-AT compatible) LSM-5200/6100/6900/9506
5 6 specified as a terminal (DTE) specified as a terminal (DTE)
1 9
Signal No. of pin No. of pin Signal
DCD 1 1
RxD 2 2 RxD
6 9 5 1 TxD 3 3 TxD
DTR 4 4 DTR
LSM-6200/6900/9506 LSM-5200 SG 5 5 SG
DSR 6 6 DSR
RTS 7 7 RTS
CTS 8 8 CTS
RI 9 9
Communication Specifications D-sub (9-pin) D-sub (9-pin)
Definition of device DTE definition on the side of LSM Example 2: Flow control method (handshake method controlled
Data transmission method All-duplex transmission by CTS, DSR, DTR, and RTS signals)
Syncronizing method Start-stop system PC (PC-9801) LSM-5200/6100/6900/9506
specified as a terminal (DTE) specified as a terminal (DTE)
Data transmission 6200 4800, 9600, 19200, 38400bps
Signal No. of pin No. of pin Signal
speed 5200, 6900 1200, 2400, 4800, 9600, 19200bps FC 1 1
Transmission code ASCII TxD 2 2 RxD
RxD 3 3 TxD
Data length 7 or 8 bits RTS 4 4 DTR
Data Start bit 1 bit
arrangement CTS 5 5 SG
Parity check Non, odd or even DSR 6 6 DSR
SG 7 7 RTS
Delimiter CR+LF, CR, LF DCD 8 8 CTS
DTR 20 9
D-sub (25-pin) D-sub (9-pin)
Commands Example 3: 3-Wire method (teletype protocol using TxD, RxD and SG)
Various external commands, including those for setting measuring
conditions, setting the measurement mode, starting measurement, PC (PC-AT compatible) LSM-5200/6100/6900/9506
and requesting statistical calculation, are supported. This allows the specified as a terminal (DTE) specified as a terminal (DTE)
user to control the LSM from an external unit (e.g. PC) for customized Signal No. of pin No. of pin Signal
measurements. DCD 1 1
RxD 2 2 RxD
TxD 3 3 TxD
DTR 4 4 DTR
SG 5 5 SG
DSR 6 6 DSR
RTS 7 7 RTS
CTS 8 8 CTS
RI 9 9
D-sub (9-pin) D-sub (9-pin)
32
*Not available for LSM-9506
I/O-Analog Interface*
Used to communicate with a PC, programmable controller, or relay circuitry (2) Output circuit
by means of sequential signals. It is also capable of producing an analog 1. Control signal output
voltage output that may be used for feedback control and/or continuous 51 Output signal
recording of workpiece dimension deviation. (GO, -NG, +NG, STS)
B1 B6 0V
Voltage
•Low-level signal to be between 0 and 1V. Generally drive this circuit with
an open collector-type transistor.
• Maximum current drawn from the input signal terminal is 12mA. Time Time
33
Optional accessories
LSM-5200 LSMPAK
LSM-S series
18 1
36 19
34
Digimatic Code-out Unit (02AGC840) *Not available for LSM-6900
• Provides two channels of SPC (Digimatic) output. Dual-type Add-on Unit (02AGP150)*
• Outputs the following during simultaneous measurement: From OUTPUT1: • Enables a second measuring unit to be connected to the display unit (this is
Measured values by PRG.0 through PRG.4. From OUTPUT2: Measured possible only if the two measuring units are the same model).
values by PRG.5 through PRG.9 • Depending on the layout of the two measuring units, large-diameter
• The output cable (936937) is optional. measurement, XY measurement, and parallel measurement are possible.
• The sub-display of the LSM-6200 allows simultaneous measurement and
display with two measuring units.
Terminal
2, 3, 4
9 1
XY measurement
X Y
10 2
35
Optional accessories
36
System Extension Devices Thermal Printer
• This printer can be connected to any LSM-5100, -6200, -6900 or -9506
model.
Extension Cable for Concurrent Installation of • Both measurement values and statistical calculation results can be printed
BCD and Second I/O-Analog Interface (only with LSM-6200/6900/9506).
• Connection cable is supplied.
No.02AGE060
*Restrictions
If this cable is used, the dual extension unit (No.02AGP150) is not
available.
Example
BCD No.2 I/O•Analogue Footswitch (937179T)*
• Connecting the Footswitch to the LSM-6100/6900/9506 enables the user
to initiate a single measurement externally.
937179T
37
Glossary
True value
Ideal relationship:
1. Linearity measured value = true value
True value
This is a specified value that defines the maximum error* that may be Ideal relationship:
indicated by the LSM after calibration**, anywhere within its measuring measured value = true value
range, when measuring a workpiece in the center of the measuring region. Maximum error
Note that the linearity specification does not include the calibration error Linearity
specification of the calibration gages themselves. This error must be added Maximum error
separately.
Linearity
* The difference between the result of measuring a dimension and the
true value of the dimension measured. Measured value
LoCAL HiCAL
** Optional calibration gages are available for each model of LSM to
provide appropriate high and low calibration points (HiCAL and LoCAL Measured value
on the diagram). LoCAL HiCAL
5 Measuring region
4. Measuring region 1 2
The LSM provides numeric values for which the accuracy (linearity + 6 3
5 Measuring region
position error) is guaranteed only if a workpiece is located within the Laser scanning
prescribed space domain. This domain is called the measuring region. direction
4
2
A measuring region is determined by [laser beam scanning direction 6 3
range] x [optical axis direction range]. To perform measurement with a Laser scanning
minimum of error, it is necessary to measure a workpiece at the center of direction
4
this measuring region. As an example in the figure right, workpieces 1, 2, Optical axis direction
5, and 6 cannot be measured because these are outside the measuring
region. For workpieces 3 and 4, a position error is added to a linearity error.
Optical axis direction
38
Precautions
Observe the following precautions
Compatibility Electrical interference
Your Laser Scan Micrometer has been adjusted together with To avoid operational errors, do not route the signal cable and
the ID Unit, which is supplied with the measuring unit. The relay cable of the Laser Scan Micrometer alongside a high-
ID Unit, which has the same code number and the same voltage line or other cable capable of inducing noise current
serial number as the measuring unit, must be installed in the in nearby conductors. Ground all appropriate units and cable
display unit. This means that if the ID Unit is replaced the shields.
measuring unit can be connected to another corresponding
display unit. Connection to a computer
If the Laser Scan Micrometer is to be connected to an
The workpiece and measuring conditions external personal computer via the RS-232C interface, ensure
Depending on whether the laser is visible or invisible, the that the cable connections conform to the specification.
workpiece shape, and the surface roughness, measurement
errors may result. If this is the case, perform calibration with a Laser safety
master workpiece which has dimensions, shape, and surface Mitutoyo Laser Scan Micrometers use a low-power visible
roughness similar to the actual workpiece to be measured. If laser for measurement. The laser is a CLASS
measurement values show a large degree of dispersion due 2 IEC 825-1 device and a CLASS II 21 CDRH
to the measuring conditions, increase the number of scans device. Warning and explanation labels,
for averaging to improve the measurement accuracy. as shown right, are attached to
the Laser Scan Micrometers as is
appropriate.
(1) Alignment within the horizontal plane (2) Alignment within the vertical plane
a. Parallel deviation between reference lines C c. Parallel deviation between reference planes A
and D: X (in the transverse direction) and B: Y (in height)
Reference Reference Reference Reference
line C line D plane A plane B
θx θy
39
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