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(Autonomous)
COIMBATORE -32
Degree: ME / Branch: MECHATRONICS Semester: II / Year: I
Course Code: 15HC08
Course Title: Micro Electro Mechanical Systems
UNIT-I OVERVIEW OF MEMS AND MICROSYSTEMS
PART B (16 Marks for each question)
1) Brief on
i) History of MEMS development (5)
ii) Evolution of MEMS (6)
iii) Future trends (5)
2) Write short notes on
i) Miniaturization (5)
ii) Microelectronics integration (6)
iii) MEMS as microsensor (5)
3) Explain in detail about
i) Microsystem and it components (5)
ii) Involvement of various disciplines of engineering in the design and manufactuing of
microsystem. (6)
iii) Application of microsystems in aerospace industry (5)
4) i) Differentiate microsystem and microelectronics. (6)
ii) Application of microsystems in automotive industry (5)
iii) Merits of miniaturization (5)
5) i) Draw a flowchart to indicate the involvement of various disciplines of engineering in the
design and manufactuing of microsystem. (6)
ii) Write about the involvement of engineering disciplines in microsystem design,
manufacture and packaging. (5)
iii) Draw a flow chart for MEMS as a microsensor along with its functionality. (5)
6) i) Write short notes on the various types of microsensors used in industry. (6)
ii) Draw a flow chart for MEMS as a microactuator along with its functionality. (4)
iii) Draw a flow chart for intelligent microsystem along with its functionality. (6)
7) Write short notes on the following microsystem products
i) Microgears (4)
ii) Micrometers (4)
iii) Micro optical components (4)
iv) Micro turbines (4)
8) Write in detail on the application of microsystems in automibiles on the following areas
i) Safety (4)
ii) Engine and power train (4)
iii) Comfort and convenience (4)
iv) Vehicle diagnostics and health monitoring (4)
9) List the applications of microsystem in the following industries
i) Health care industry (4)
ii) Manufacturing industry (4)
iii) Consumer products (4)
iv) Telecommunication industry (4)
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10) i) Why cannot traditional manufacturing technologies such as mechanical milling,

drilling, and welding be used to produce microsystem? (6)
ii) Give atleast four distinct advantages of miniaturization of machines and devices. (4)
iii) Why cannot microelectronics technology be adopted in the design and packaging of
MEMS and microsystem products? (6)

Staff in charge Dean/Mech

V. V. Arun Sankar Dr.P.Suresh
Asst. Professor Professor and Dean
Department of Mechanical Engineering Department of Mechanical Engineering