METR3100: Sensors and Actuators

http://www.mech.uq.edu.au/courses/metr3100/

Sensor Introduction
Han Huang
Room 45-212; Phone: 3365 3583
han.huang@uq.edu.au

METR3100: Sensor Introduction

Introduction to sensors
What is a sensor?
What will we learn?
Future sensors:

MEMS based sensors

METR3100: Sensor Introduction

What is a sensor?
Formal definition: A device that receives and responds
to a signal or stimulus
American Heritage Dictionary of the English Language

Informally, a sensor is a device that takes in

information from the outside world. Based on the
information, the sensor creates a signal on which a
system can make a decision.
A sensor, thus, has an input and an output

METR3100: Sensor Introduction

What is a sensor? (cont.)

A sensor will measure some physical quantity and
convert it into some electrical signal (e.g., voltage)
You would also want to do something intelligent based
on the signal (turn on a heater, sound an alarm,
pass/fail an industrial part, etc)

physical
parameter

Sensor

electrical
signal

Recording
System

METR3100: Sensor Introduction

Sensor Characteristics
What are some important quantities of a sensor?

Sensitivity, Resolution
Accuracy, Precision
Repeatability, Reliability
Response function
Dynamic range
Noise characteristics
Uncertainty

METR3100: Sensor Introduction

Sensing Systems
What advantages do sensors have over using a human?
human
Repeatability - sensor output is very stable over time
whereas a human may suffer from fatigue
Reliability - a sensor usually wont need breaks,
vacations
Harsh environments - a sensor can operate in many
environments that humans may not
Sensitivity - sensors can be more sensitive than the
corresponding human sense

METR3100: Sensor Introduction

Reliability Issue of Testing A True Story

METR3100: Sensor Introduction

What will we learn?

Sensing systems

Temperature
Pressure
Strain
Force and torque
Displacement and transport
Vibration
Air pollution

Also including
Amplifiers and signal conditioning
Data acquisition and processing

METR3100: Sensor Introduction

Future Sensors

MEMS based sensors

METR3100: Sensor Introduction

What is a MEMS sensor?

Microelectronic integrated circuits that have
changed our lifestyle in the past two decades
can be imagined as the "brains" of a system
and MEMS augments this decision-making
capability with "eyes and "arms", to allow the
system to sense and control the environment.
A sensor is described as eyes or ears or
nose

METR3100: Sensor Introduction

What is MEMS
MEMS refers to micro-electro-mechanical systems
Tiny mechanical devices built onto semiconductor
chips
MEMS typically combine two or more properties on a
single microchip, such as electrical, mechanical,
biological, magnetic, optical or chemical properties
Most MEMS generate or sense motions
(like actuators, mirrors and cantilevers)
METR3100: Sensor Introduction

MEMS Applications : Automotive

Today there are ??? sensors in one car

Applications:
- engine monitoring
- safety
- comfort
- navigation

Radio-Frequency MEMS (RF MEMS)

RADAR

Parking help

50 to 100

Courtesy of Polytec

METR3100: Sensor Introduction

Devices

Applications

Accelerometers, Gyroscopes

Airbag, Vehicle Dynamic Control,

rollover sensing, GPS

Biometric sensors

Access control

Chemical, humidity sensors

Heating Ventilation Air

Conditioning, oil condition

Magnetic sensors

Wheel speed, pedal position,

steering wheel angle

Micro Nozzles

Fuel injection

Pressure sensors

Air intake, brakes, turbo pressure,

tire pressure, fuel injection,

METR3100: Sensor Introduction

Aerospace and Defence

Courtesy of Polytec
METR3100: Sensor Introduction

Devices

Applications

Accelerometers, Gyroscopes,
Magnetometers

Inertial navigation

Chemical sensors, Biochips

Detection of chemical / biological

weapons

Flow sensor

Monitoring of pilots breathing,

supersonic flow

Micro displays, Micro mirrors

Communication and inter satellite

optical link

Pressure sensors

Altitude control

RF MEMS

Radio communication

METR3100: Sensor Introduction

Reasons of using MEMS

Low energy consumption

Low weight
Very small size
Low cost at high volumes
(more automotive applications)

Airbag sensor (Toyota): US$50 to US$7

New functionalities

METR3100: Sensor Introduction

Pressure Sensor

Toyota 32 x 32 (1K)-element piezoresistive

pressure/tactile sensor array (Sugiyama et
al. 1990).

Toyota's surface micromachined piezoresistive microdiaphragm

pressure sensor (Shimaoka et al. 1993).
METR3100: Sensor Introduction

The Impact
Conventional air bag pressure sensor device: US$50.
US$50.
MEMS based pressure sensor and device: US$7

According to a report from Venture Development

Corporation (Natick, MA), automotive market will
represent 5.2 percent of the overall $34.2 billion
MEMS market in 2006 or more than $1.7 billion, up
from $1.1 billion in 2001.

METR3100: Sensor Introduction

Gyroscope

It took five years to develop gyroscopes

Introduced on the market in 2000
Now several millions are produced every year by Robert Bosch GmbH

METR3100: Sensor Introduction

Pressure sensor

Sensor Orbital Research Inc. develops a MEMS-based high temperature pressure

transducer technology for diesel and turbine engine applications.
Based on a thin film strain gage configuration using MEMS fabrication techniques
and a highly sensitive, novel thin-film material.
The technologies combine synergistically resulting in a unique, high temperature
sensor with high sensitivity at an affordable price.
Have high gage factor (sensitivity) and high temperature capability is significantly
greater than competing technologies.
Demonstrated in the harsh diesel engine environment (reliability)
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High Temperature Pressure Sensor

Orbital Research Inc.
Pressure Ranges: 0-60, 0-1000, 0-3000, psi
Operating Temperature: 400 oC for Diesel
Engines - Can be tailored for higher operating
temperatures up to 600 oC.
Accuracy: 1% full scale
Proof Pressure: 150% full scale
Burst Pressure: 200% full scale
Wheatstone Bridge Design
Gage Factor: 35 to 100
Dynamic Frequency Response: >30 kHz
Dimensions: < = 9 mm dia.
Sensing element size: small as 0.5 x 0.5 mm

A 4th year mechatronic student is designing high pressure sensor for

hypersonic application
METR3100: Sensor Introduction

Cricket-Inspired Sensory Hairs with Capacitive

Motion Detection

Courtesy University of Twente, MESA+

Research Institute

METR3100: Sensor Introduction

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Perception of air flow and escape action of crickets

Mechanical and functional properties of filiform hair
Design and realize large arrays of MEMS sensors
METR3100: Sensor Introduction

Accelerometer

Si capacitive sensor: made of single crystal silicon and glass

Design ensures exceptional reliability
Excellent accuracy and stability over time and temperature.
Capacitive detection principle is simple and stable, based on the variation
of a gap between two planar surfaces. The capacitance or charge storage
capacity of a pair of plates depends on the gap width and plate area.
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Comb-type Accelerometer
Accelerometers in two basic types:
comb and diaphragm.
With comb-type MEMS accelerometers,
changes in g-forces cause the
interleaved fingers of the comb to
bend, resulting in a measurable
change in conductivity, also called a
piezoelectric effect.
Diaphragm type accelerometers have a
thin silicon diaphragm over a charged
plate. As the distance between the
flexible silicon layer and the charged
plate change, so does the capacitance.

METR3100: Sensor Introduction

Humidity Sensor
K.Govardhan and Z.C.Alex, Proceedings of ISSS 2005

using a micro
cantilever beam

The cantilever structure was formed out of silicon and was made suitably to comply
with the mass or pressure variations due to change in humidity.
The design also incorporates integration of the platinum based temperature sensor
and a platinum based heater.
The key point is to keep all the electrodes and leads at one convenient end for easy
packaging and providing power to the sensor and to take leads for the outputs.
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Other Applications

Inexpensive and easy-to-use three-axis accelerometer devices will find

applications in toys, industrial production equipment, robotics and automotive
systems. It is also useful as a general-purpose vibration sensor for industrial
equipment and domestic appliances.
Three-Axis Linear Accelerometer, in a compact package, the first one-chip
three-axis MEMS accelerometer sensor, plus an interface chip that translates
movement and inclination into calibrated analog voltage or digital outputs.
Compared to multiple one-axis sensors the new device simplifies assembly,
reduces size and cuts production costs.
Accelerometers based on silicon-micromachined MEMS technology are
effective because they provide high sensitivity and precision together with the
economies of scale of the wafer batch process used to make integrated circuits.
METR3100: Sensor Introduction

Health Products

Omron will display its innovative portfolio of photomicrosensors

(optoswitches) and intelligent sensors for detection of mass and velocity gas
flow, and differential and gauge pressure changes
Among the highlights of the show will be Omron's new range of MEMS
precision velocity and large mass airflow sensors and the new capacitive
touch sensor
Omron's D6F-W MEMS-based sensors are to detect clogged air intake filters
and air velocity flows in office automation equipment, domestic air purifiers
and coolers, and other more conventional applications.
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Military Uses

METR3100: Sensor Introduction

MEMS Sensor Development

MEMS Infrared Detector for
Thermal Imaging
High sensitivity
wide bandwidth detection

Real time spectral detection

fast tunable filters

High spectral resolution

MEMS technology for Large 2D arrays

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Infrared Detector

Incident
IR

Electrostatic tuning to
change cavity length

Fe (x ) =

Reflected
IR

Mirror

Cavity Length, d

Mirror

A
2 d

Transmitted IR

FabryFabry-Perot Filter
d=1700 nm

d=900 nm

V
substrate
Metal
Membrane
Thin film mirror

Transmission

100.0%
75.0%

Detector

50.0%
25.0%
0.0%
2

2.2

2.4

2.6

2.8

3.2

Wavelength (
(m)

METR3100: Sensor Introduction

Infrared Detector Models

Top Mirror

SiNx Layer

Ground

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Testing Models

After Wet Release (still in fluid blue filter) - Before CPD

After CPD blue filter

METR3100: Sensor Introduction

Making MEMS via Surface Micromachining

sacrificial

By PECVD
substrate

substrate

membrane

Deposition and patterning of

sacrificial material
Deposition and patterning of material
used for the suspended structure
Removal of the sacrificial layer

Class 1000 clean roomMETR3100: Sensor Introduction

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METR3100: Sensor Introduction

MEMS Infrared Sensor Array

205nm

-185nm

Blue Filter 220nm Fringe-to-Fringe

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References

Experimental Methods for Engineers, J. P. Holman, 7th Edition,

McGraw-Hill, 2001.
MEMS Mechanical Sensors, Edited by S. Beeby et al, ARTECH House,
Inc., 2004.

http://airglow.csl.uiuc.edu/Teaching/ECE437/
http://www.sensortechnics.com
http://www.wtec.org/loyola/mems/c3_s2.htm

H. Huang, J. Micromech. Microeng. 15 (2005) 608614.

K. Govardhan and Z.C. Alex, Proceedings of International Conference
on Smart Materials Structures and Systems, July 28-30, 2005,
Bangalore, India, pp20-27.

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