evo ma15 corr.qxd 01.08.

2007 13:12 Seite 1

Carl Zeiss SMT Nano Technology Systems Division

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The EVO

18 provides excellent
quality imaging results from an
analytical microscope with the
capability to handle all material types.

The class leading x-ray geometry
provides the most accurate analyses
on all specimens with ports for both
Energy and Wavelength Dispersive
Spectroscopy (EDS & WDS) as
standard. Additional improvements to
image quality and analytical accuracy
are delivered for non conductors by
the optional BeamSleeve

.

With the LaB
6
high brightness source
upgrade, new levels of performance
become available particularly at
probe currents associated with X-ray
analysis.

The EVO

18 can handle specimens

of up to 250 mm diameter and 145
mm tall. Furthermore, the coplanar
design provides the ideal geometry
for EBSD in combination with EDS.

Whatever your Materials Analysis
challenge, the EVO

18 focuses your
imaging expectations.

Class leading analytical X-ray
geometry & WDS port as standard
Charge compensation using variable
pressure operation
Large stage travel
BeamSleeve

to provide enhanced
analytical performance
High performance imaging with
optional LaB
6
source

EVO

18 The complete Materials

Analysis solution.



Enabl i ng t he Nano- Age Wor l d

N
E
W
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evo ma15 corr.qxd 01.08.2007 13:12 Seite 2
EVO
@
18 Essential Specifications
Imaging Solution

Conductors, Non conductors, Highl y outgassing
specimens
Resolution




3nm (2nm)
4.5nm
15nm
20nm (15nm)
10nm
@ 30kV SE and W (LaB6)
@ 30kV BSD (VP mode)
@ 30kV 1nA, LaB6
@ 1kV SE and W (LaB6)
@ 3kV SE
Acceleration Voltage 0.2 - 30kV
Magnification < 5 - 1,000,000x
Field of View 6mm at the Analytical Working Distance (AWD)
X-ray Geometry 8.5mm AWD and 35 take-off angle
OptiBeam

* Modes Resolution, Depth, Analysis, Large Field

Pressure Range 10 - 400Pa with air or optionally water vapour
Available Detectors





BSD Multisegment Diode
ETSE Everhart-Thornley
Secondary Electron Detector
VPSE Variable Pressure
Secondary Electron Detector
SCD Specimen Current Detector
Chamber Dimensions 365mm () x 275mm (h)
5-Axes Motorised
Compucentric Specimen
Stage



X = 125mm
Y = 125mm
Z = 50mm
T = 0 - 90
R = 360 (continuous)
Stage control by mouse, joystick or control panel
Future Assured
Upgrade Paths



BeamSleeve

Extended pressure (up to 3000Pa)
Water vapour
EPSE Extended Pressure
Secondary Electron Detector
Image Processing

Resolution: Up to 3072x2304 pixel
Signal acquisition by integrating and averaging
Image Display

High quality flat panel with SEM image displayed at
1024x768pixel
System Control


SmartSEM

** GUI operated by mouse and keyboard

Multilingual CONCISE GUI
Multilingual Windows

XP operating system
Utility requirements

100 - 230V, 50 or 60Hz single phase
No water cooling requirement
OptiBeam

* Active column control for highest resolution, largest field of view, or best depth of field
SmartSEM

** Fifth generation SEM control Graphical User Interface

Carl Zeiss SMT Nano Technology Systems Division
Global Solution Provider
The Nano Technology Systems Division of Carl Zeiss
SMT provides its customers with complete solutions
featuring the latest leading-edge EM technology. The
companys extensive know-how, meticulously acquired
over 60 years in the field of E-beam technology, has
brought many pioneering innovations to the market.
Our global applications and service network
guarantees fast, reliable and high quality support
sharply focused on customer requirements. Combined
with dedicated upgrade strategies, this will protect your
investment for its entire lifetime. The core technology
embedded in our innovative products enables us to
provide solutions which add value to our customers
business.
Customer feedback is always welcomed and gathered
by collecting valuable information at trade shows, in
workshops, in user meetings and upon instrument
installation. The Divisions business services also
include outstanding support from sales consultancy to
technical service options even when the warranty has
expired.
Carl Zeiss SMT Pte Ltd.
Jean Yip Building
50 Kaki Bukit Place #04-01
Singapore 415926
Tel: +65 65 67 / 30 11
Fax: +65 65 67 / 51 31
info.sea@smt.zeiss.com

Carl Zeiss Shanghai Co.,
Ltd.
1/F, Ke Yuan Building,
11 Ri Ying Nan Road
Waigaoqiao Free Trade
Zone, 2005 Yang Gao Bei
Road, Shanghai, China,
200131
Tel: +8621 50481717
Fax: +8621 50482220
Info.cn@zeiss.com.cn

Carl Zeiss SMT Pte Ltd.
SF-1, No. 158, Sec. 2
Gongdao 5th Rd, Hsinchu
City 300
Taiwan (R.O.C.)
Tel: +886 3 575 0203
Fax: +886 3 575 2406

Carl Zeiss SMT Co., Ltd.
6th Floor, Dr Gerhard Link
Building
88 Krungthepkreetha
Road, Huamark
Bangkapi, Bangkok 10240
Thailand
Tel +66 2730 8162
Tel +66 2730 8163

Plus a worldwide network
of authorised distributors

www.smt.zeiss.com/nts