Measuring Precise Displacements

ME 324 Precision Engineering

Stephen Hibbs, Ethan Nash, Trent Lukaczyk June 13, 2012

Outline
1. 2. 3. 4. 5. 6. 7. 8.
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Background Requirements Design Exploration Rapid Prototyping Final Design Demonstration Performance Results Conclusions
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Background
The Problem
Accurately measure roundness

Last Year
Measured movement of mirror-deflected laser on CCD

This Year
Make it smaller and more robust
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Application
Gravity Probe Gyroscopes

Application
spindle error motion repeatability: TBD, target 50nm total measurement performance: TBD, depends on displacement sensor price: $5000

Finishing with a light line RMM

Current Technology
can evaluate radial deviations to 10nm partly limited by a spindle repeatability of 5nm price: ? ($50k for Taylor Hobson tune-up.)

Talyrond 73

can evaluate radial deviations to 5m price: $50k-$200k

Typical CMM

Previous Work
Last Years Design

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Specifications and Requirements

Main Goal Make it smaller and more robust than last years projects Beat the precision of the PRL CMM Specifications Resolution: <1 m Repeatability: <5 m Stiffness: 500 mN/mm Range: 1 mm Requirements Small, Easy to use, Robust
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Design Exploration
Size Mech. Complexity Elec. Complexity Robustness Feasability

Diffraction Grating

Small

Laser, Grating, CCD, Flexure

CCD, wires, phase High locking CCD, wires, phase High locking CCD, wires, phase Medium locking CCD, wires, laser, phase locking square wave signal, measure risetime CCD, wires Medium

High

Shadow Blade

Aperature Grating

Interferometer

Capacitive

LED, Diffuser, Blade, CCD, Filter, Flexure Also small Laser, Two gratings, CCD, Flexure Medium Laser, Beam splitter, Mirrors, CCD, Flexure Small Flexure, 2x Precise Plates, Dialectric Smallest Big Flexure, Mirror, CCD Flexure, More Mirrors, CCD

High

Medium

High

Low

Low

Rotating Mirror

Medium

Low

Multiple Mirrors
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Medium

CCD, wires

Low

Low

June 13, 2012

Design Exploration
Size Mech. Complexity Elec. Complexity Robustness Feasability

Diffraction Grating

Small

Laser, Grating, CCD, Flexure

CCD, wires, phase High locking CCD, wires, phase High locking CCD, wires, phase Medium locking CCD, wires, laser, phase locking square wave signal, measure risetime CCD, wires Medium

High

Shadow Blade

Aperature Grating

Interferometer

Capacitive

LED, Diffuser, Blade, CCD, Filter, Flexure Also small Laser, Two gratings, CCD, Flexure Medium Laser, Beam splitter, Mirrors, CCD, Flexure Small Flexure, 2x Precise Plates, Dialectric Smallest Big Flexure, Mirror, CCD Flexure, More Mirrors, CCD

High

Medium

High

Low

Low

Rotating Mirror

Medium

Low

Multiple Mirrors
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Medium

CCD, wires

Low

Low

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Diffraction Grating

Light Source

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CCD

Shadow Blade
CCD Pixels Desired Signal

Blade
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Rapid Prototyping

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Rapid Prototyping
Shadow Making Shapes

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Rapid Prototyping

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Final Design
Overview

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Final Design

Base and LED Bar

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Final Design

LED Bar Mount

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Final Design

Flexure
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Final Design

CCD Mount
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Final Design

CCD
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Final Design

CCD Support Electronics and Lid

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Final Design

Slanted Slits
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Perpendicular Slits

Construction

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Construction

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Construction

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Construction

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Data Processing Algorithm

The need for data processing
CCDs are discrete devices in terms of both brightness and pixel location A certain amount of interpretation is required Its not statistics
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Data Processing Algorithm

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Data Processing Algorithm

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Data Processing Algorithm

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Data Processing Algorithm

M

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Demonstration

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Testing Static Stability

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Performance Results

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Performance Results

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Testing - Displacement

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Performance Results
Probe Deviation vs Displacement
3.00 2.50 2.00

Deviation (m)

1.50 1.00 0.50 0.00 -0.50 -1.00 -1.50 0 200

Reverse

Forward
400
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600

800

1000

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Target Displacement (m)

Performance Results
Short Range Deviation vs Displacement
1.00 0.80 0.60

Deviation (m)

0.40 0.20 0.00 -0.20 -0.40 -0.60 -0.80 500 505 510 515 520 525 530 535 540 545 550

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Target Displacement (m)

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Performance Results
Flexure Stiffness = 775 mN/mm
800 700 600

Force (mN)

500 400 300 200 100 0 0 100 200 300 400 500 600 700 800 900 1000

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Displacement (m)
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Outline
1. 2. 3. 4. 5. 6. 7. 8.
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Background Requirements Design Exploration Rapid Prototyping Final Design Demonstration Performance Results Conclusions
June 13, 2012

Conclusions
Main Goal Make it smaller and more robust than last years projects Beat the precision of the PRL CMM Final Results Spec Re
Resolution Repeatability Stiffness Range Size Usability Total Cost
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Final 0.006 m 0.5~1.0 m 775 mN/mm 2 mm 80 x 80 x 75 mm Awesome $600

<1 m <5 m 500 mN/mm 1 mm Small Easy Cheap

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Conclusions
Future Work
Build and test performance of slanted grating Integrate a better performance CCD Address large-range hysteresis

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Acknowledgements
Our Customer Grant Cutler Surface Engineering Hwan, Steve, Dick Teaching Staff Paolo, Dan, Dave Last Years Project Teams
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Questions?

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CCD Specifications
Toshiba TCD 1304DG
3648 pixels (8 m x 200 m) Exposure Time Range: 0.1 ms 6,500 ms 216 levels of light intensity

High resolution, large amount data make

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CCDs an enabling technology

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Final Design
1 DOF Slot 2 DOF Pin Other 3 DOF Stacks springs and spacers

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Rapid Prototyping
Hardware Foam Box Blade identified signal problem Transparencies Stick desired symmetry Gratings slanted, perpendicular Flexure found desirable kinematics

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Final Design
Material Selection Thin walls, large deflection => high yield strength Low stiffness => low youngs modulus Two main choices: Aluminum, Steel
Aluminum 7075
503 MPa Yield Strength, 68.9 GPa Youngs Modulus Certified milled blanks

Built all optical mounts with Aluminum for compatible thermal expansion
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Foam Box

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Foam Box

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Data Processing Algorithm

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Data Processing Algorithm

Brightness

Threshold

Pixel Location

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Data Processing Algorithm

Brightness, (F) Threshold, (F=Ti) ( ) ( +) X1 X2 ( ) ( +) X3 X4 ( ) Pixel Location, (X)

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At each level, Ti Identify Cross-Over Locations, Xj Repeat for Each Threshold Average all Cross-Over Locations, M = mean(Xi,j) Return M June 13, 2012

Data Processing Algorithm

Type Max Min Standard Deviation

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Raw 0.435 m 0.049m

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Moving Average (5 Points) 0.202m 0.025m

Data Processing Algorithm

Type Max Min Standard Deviation

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Raw 0.435 m 0.049m

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Moving Average (25 Points) 0.092m 0.015m

Performance Results
Characterized Probe Deviation
3.00 2.50 2.00

mean 2 std. dev.

Deviation (m)

1.50 1.00 0.50 0.00 -0.50 -1.00 -1.50 0 200

Reverse

Forward
400
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600

800

1000

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Target Displacement (m)

Performance Results
Short Range Characterized Deviation
1.00 0.80 0.60

Deviation (m)

0.40 0.20 0.00 -0.20 -0.40 -0.60 -0.80 500 505 510 515 520 525 530 535 540 545 550

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Target Displacement (m)

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