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1405 J. Vac. Sci. Technol. B 24„3…, May/Jun 2006 1071-1023/2006/24„3…/1405/4/$23.00 ©2006 American Vacuum Society 1405
1406 Lee et al.: Formation of nickel nanoparticles on amorphous silicon thin film 1406
presence of Ni enhances crystallization at the interface. Such thanks the Alexander von Humboldt Foundation for the fi-
a Ni solute effect also explains why crystallization is not nancial support for the visit.
observed around the Ni nanoparticles. Unlike the NiSi2, the
1
Ni diffusion into the a-Si is prevented around them, and the J. L. Batstone, Philos. Mag. A 67, 51 共1993兲.
2
a-Si matrix would not obtain enough Ni solutes to initiate L. Hultman, A. Robertsson, H. T. G. Hentzell, I. Engström, and P. A.
Psaras, J. Appl. Phys. 62, 3647 共1987兲.
crystallization, which leads to the inhibition of crystallization 3
G. Radnoczi, A. Robertsson, H. T. G. Hentzell, S. F. Gong, and M.-A.
around the Ni nanoparticles. Hasan, J. Appl. Phys. 69, 6394 共1991兲.
4
S. F. Gong, H. T. G. Hentzell, A. E. Robertsson, L. Hultman, S. E.
V. CONCLUDING REMARKS Hörnström, and G. Radnoczi, J. Appl. Phys. 62, 3726 共1987兲.
5
C. Hayzelden, J. L. Batstone, and R. C. Cammarata, Appl. Phys. Lett. 60,
We have shown through in situ HRTEM that the NiSi2 225 共1992兲.
6
and Ni particles form during annealing at 550 ° C in the C. Hayzelden and J. L. Batstone, J. Appl. Phys. 73, 8279 共1993兲.
7
TEM. The Ni particles are single crystalline or multiply Yu. N. Erokhin, R. Grötzschel, S. R. Oktyabrsky, S. Roorda, W. Sinke,
and A. F. Vyatkin, Mater. Sci. Eng., B 12, 103 共1992兲.
twinned. The formation of the Ni particles is due to beam 8
B. Mohadjeri, J. Linnros, B. G. Svensson, and M. Östling, Phys. Rev.
heating effect by the high-energy electron beam irradiation Lett. 68, 1872 共1992兲.
9
during the in situ observation by the HVTEM. Crystalliza- K. Schubert and H. Pfisterer, Z. Metallkd. 41, 433 共1950兲.
10
tion occurs with the formation of the NiSi2 precipitates but is K. C. R. Chiu, J. M. Poate, J. E. Rowe, T. T. Sheng, and A. G. Cullis,
Appl. Phys. Lett. 38, 988 共1981兲.
forbidden around the Ni particles. Around the NiSi2, Ni sol- 11
F. Föll, P. S. Ho, and K. N. Tu, J. Appl. Phys. 52, 250 共1981兲.
utes are expected to be dissolved in the amorphous silicon 12
R. T. Tung, J. M. Gibson, and J. M. Poate, Phys. Rev. Lett. 50, 429
共a-Si兲 matrix. However, the presence of the Ni nanoparticles 共1983兲.
13
suggests that Ni solutes cannot diffuse into the a-Si matrix. R. T. Tung, S. Nakahara, and T. Boone, Appl. Phys. Lett. 46, 895 共1985兲.
14
The formation of the Ni nanoparticles could not be observed J. L. Batstone, J. M. Gibson, R. T. Tung, and A. F. J. Levi, Appl. Phys.
Lett. 52, 828 共1988兲.
in the normal heat treatment without the electron beam irra- 15
J. M. Gibson and J. L. Batstone, Surf. Sci. 208, 317 共1989兲.
diation, but the inhibition of crystallization around the Ni 16
W. Klement Jr., Can. J. Phys. 40, 1397 共1962兲.
17
particles suggests that Ni solutes enhance crystallization. S. Ino, J. Phys. Soc. Jpn. 27, 941 共1969兲.
18
A. Howie and L. D. Marks, Philos. Mag. A 49, 81 共1984兲.
19
H. Hofmeister, in Encyclopedia of Nanoscience and Nanotechnology,
ACKNOWLEDGMENTS
edited by H. S. Nalwa 共American Scientific, Stevenson Ranch, CA,
This work was financially supported by Korea Research 2004兲, Vol. 3, pp. 431–452.
20
Foundation Grant 共KRF-2004-005-D00167兲. The in situ HR- Binary Alloy Phase Diagrams, 2nd ed., edited by T. B. Massalski 共ASM
International, Materials Park, OH, 1990兲, Vol. 3, p. 2859.
TEM observation was made during a research visit of one of 21
M. E. Schlesinger, Chem. Rev. 共Washington, D.C.兲 90, 607 共1990兲.
the authors 共S.B.L.兲 to Max-Planck-Institut für Metallfors- 22
F. d’Heurle, S. Petersson, L. Stolt, and B. Strizker, J. Appl. Phys. 53,
chung at Stuttgart, Germany. One of the authors 共S.B.L.兲 5678 共1982兲.