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Mark Lundstrom Electrical and Computer Engineering Purdue University West Lafayette, IN USA Fall 2008 NCN
www.nanohub.org
Lundstrom EE-612 F08 1
outline
1) Introduction 2) Square law theory 3) PN junction effects on MOSFETs 4) Bulk charge theory (exact) 5) Summary
VGS
saturated region: VDS > VDSAT W 2 ID = eff Cox (VGS VT ) 2L I D = W Cox sat (VGS VT ) VDS = VGS VT VDS > VDSAT
I-V formulation
0 VG ID VD
I D = W QI (y ) y ( y ) Amperes
y
x
to include diffusion:
dV dFn dy dy
dV I D = W QI (y ) eff dy
I D dy = W QI V eff dV
()
W I D = eff L
VDS
Q (V )dV
I 0
outline
1) Introduction 2) Square law theory 3) PN junction effects on MOSFETs 4) Bulk charge theory (exact) 5) Summary
VG
VD
V = V ( y)
V (0) = 0 V ( L ) = VD
QI = QI ( y )
1D MOS-C: QI = Cox (VG VT )
y
x
VG VT > 0
IV relation
0 VG VD
W I D = eff L
VDS
Q (V ) dV
I
W I D = + eff Cox L
VD
[V
0
VT V ]dV
y
x
2 W VDS I D = + eff Cox (VGS VT )VDS 2 L
pinch-off
0 VG VD
QI ( L ) = Cox [VG VT VD ]
when VD = VG VT , then Qi ( L ) = 0
E y >> E x GCA fails!
y
x
but current still flows!
EC (eV) --->
ballistic simulation -5 0 5
X (nm) ---> pinch-off point: where the electric field along the channel becomes very large. Note that electrons are simply swept across the high-field (pinched-off) portion Lundstrom at very high velocity. EE-612 F08 10
beyond pinch-off
0 VG VD
2 W VDS I D = + eff Cox (VGS VT )VDS 2 L
V (x ) = (VGS VT )
I D I D (VDS = VGS VT )
y
x
L L
small VDS
W I D = eff Cox (VGS VT )VDS L
large VDS
W 2 I D = eff Cox (VGS VT ) 2L
2L
12
outline
1) Introduction 2) Square law theory 3) PN junction effects on MOSFETs 4) Bulk charge theory (exact) 5) Summary
13
y
x
VG = VT , S = 2 B qVbi EC ( y ) E = q (Vbi 2 B ) = k BT ln( N D N A ) 0.1 eV
Lundstrom EE-612 F08
EF
14
VR > 0
VG
VR > 0
y
x
15
qVbi + VR
Fp = EF VG = VT , S = 2 B + VR VR
EC ( y ) Fn = EF qVR
16
VR > 0
VG
VR > 0
y
x
17
q S = q (2 B + VR ) qVR
Fp EV ( x ) Fn
18
VT = VFB + 2 B + 2 q Si N A (2 B ) Cox
with reverse bias (VG at onset of inversion):
VG = VFB + 2 B + VR + 2 q Si N A (2 B + VR ) Cox
VT of the MOSFET is defined as VGS at the onset of inversion
VT = VG VR = VFB + 2 B + 2 q Si N A (2 B + VR ) Cox
Lundstrom EE-612 F08 19
VS = 0
VG
VD > 0
Fn = Fp = EF
Fn = Fp qVD
Fn increasingly negative from source to drain (reverse bias increases from source to drain)
Lundstrom EE-612 F08 20
Qi ( y )
y
x
bulk charge
(square law)
y
VT ( y) = VFB + 2 B + V (y ) + 2 q Si N A [2 B + V ( y )] Cox VT ( y ) VFB + 2 B + V (y ) + 2 q Si N A (2 B ) Cox = VT (0 ) + V (y )
Lundstrom EE-612 F08 22
WDM
VGS > VT
VBI
2 B
Gated doped or p-MOS with adjacent n+ region a) gate biased at flat-band b) gate biased in inversion A. Grove, Physics of Semiconductor Devices, 1967.
23
VR
VR
VR
VBI + VR
S = 2 B + VR
Gated doped or p-MOS with adjacent, reverse-biased n+ region a) gate biased at flat-band b) gate biased in depletion b) gate biased in inversion A. Grove, Physics of Semiconductor Devices, 1967. Lundstrom EE-612 F08
24
the MOSFET
(a)
2D e-band diagram for an n-MOSFET
a) device
(b) (c)
b) equilibrium (flat band) c) equilibrium (S > 0) d) non-equilibrium with VG and VD >0 applied SM. Sze, Physics of Semiconductor Devices, 1981 and Pao and Sah.
(d)
FN
Lundstrom EE-612 F08 25
outline
1) Introduction 2) Square law theory 3) PN junction effects on MOSFETs 4) Bulk charge theory (exact) 5) Summary
26
I-V formulation
I D = W QI (y ) y ( y )
VG
ID
VD
W I D = eff L
VDS
Q (V )dV
I
0
y
x
QI ( y ) = Cox [VG VT ( y )]
VT ( y) = VFB + 2 B + V ( y) QD (V ) Cox
VT ( y ) = VFB + 2 B + V ( y) + 2 q Si N A (2 B + V ( y)) Cox
Lundstrom EE-612 F08 27
IV relation
W I D = eff L
VDS
Q (V ) dV
I
0
(1)
Insert (2) in (1) and integrate, find eqn. (3.18) of Taur and Ning, but 3/2 powers are inconvenient. (See Pierret, for a more extended discussion of the bulk charge theory.)
Lundstrom EE-612 F08 28
can we approximate QD ?
QD (V ) = 2 q Si N A (2 B + V )
can we use a linear approximation for QD?
QD (V )
QD (0) = 2 q Si N A (2 B )
29
outline
1) Introduction 2) Square law theory 3) PN junction effects on MOSFETs 4) Bulk charge theory (exact) 5) Summary
30
MOSFET IV approaches
W I D = eff L
VDS
Q (V )dV
I
0
31
MOSFET IV approaches
In practice, a simplified bulk charge theory (to be discussed in Part II) is typically used. But none of these theories describe modern short channel MOSFETs, for this ID ~ (VGS - VT) in the beyond pinch-off region. For that, we need to consider velocity saturation, which is also discussed in Part II of this lecture.
32
suggested reference
For a thorough treatment of MOSFET theory, see: Yannis Tsividis, Operation and Modeling of the MOS Transistor, 2nd Edition, WCB McGraw-Hill, Boston, 1999. especially Chapters 3 and 4
33