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FloTron Configuration Guide

5 SIMPLE STEPS TO CONFIGURE A FLOTRON SYSTEM FOR YOUR APPLICATION


PART NUMBER

DESCRIPTION

1. CONTROLLERS

[STEP 1: choose one]

FT-3

FloTron 3
3 actuator outputs; 4 analog voltage inputs, up to 1 OI-PMT or 1 OI-SPEC type
input.

FT-5

FloTron 5
5 actuator outputs; 4 analog voltage inputs and up to 3 OI-PMT or 4 OI-SPEC
type inputs.

FT-9

FloTron 9
9 actuator outputs; up to 4 analog voltage inputs and up to 5 OI-PMT or 4 OISPEC type inputs.

FT-H

FloTron H
5 or 9 actuator outputs; 4 analog voltage inputs and up to 2 OI-PMT and up to
1 OI-SPEC type inputs.

FT-I

FloTron I
4 analog voltage inputs and up to 5 OI-PMT or 8 OI-SPEC type inputs.

2. INPUTS

[STEP 2: choose and select appropriate quantity]

OI-PMT-01

Optical input, PMT


PMT-based. 1 wavelength (10 nm bandwidth) per input in a spectral range of
200-900 nm. For DC and MF AC, p-DC and RF plasmas.

OI-PMT-02

Optical input, PMT


PMT-based. 1 wavelength (10 nm bandwidth) per input in a spectral range of
200-900 nm. For DC and MF AC, p-DC, RF and HIPIMS plasmas.

FLT-HHH

Interference Filter
for FT-3/5/9 ; HHH is the centre wavelength in nm.

OI-SPEC-01

Optical input, CCD


Spectrometer-based; 190-1040 nm detector spectral range. For DC and MF
AC, p-DC, RF and HIPIMS plasmas. Optical resolution 1-6 nm.

OI-SPEC-02

Optical input, CCD


Spectrometer-based; 190-1040 nm detector spectral range. For DC and MF
AC, p-DC, RF and HIPIMS plasmas. Optical resolution 0.49 nm.

Contacts: www.flotron.net/contacts
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3. OPTICAL ACCESSORIES [STEP 3: choose, specify and select appropriate quantity]


CTA-01-AA-BBGGG

Collimating Tube Assembly for plasma monitoring


CTA-01 includes optical components comprising a collimating tube assembly
and an optical fibre feed-through.
AA is the type of collimator tube: select AP for a tube with Ar purge (1/8
Swagelok tubing) or PG for a tube with protective glass. BB is the choice of
optical feed-trough mounting and can be 00 (1/2 hole), KF (KF/NW flange) or
CF (Conflat flange) and the GGG part is reserved for specifying the size of the
flange.

RP-01

Remote Plasma-based optical assembly for process gas monitoring


RP-01 set is an optical assembly of components comprising the remote
plasma source.

FBO-DDD

Fiberoptical cable
DDD is length in cm.

4. COMMUNICATION

[STEP 4: choose OPTIONAL industrial communication interface]

COMM-01
COMM-02

PROFIBUS communication interface for FloTron

5. ACTUATORS

[STEP 5: choose, select quantity, specify (range, length)]

FT-GCU

FloTron GCU

PROFINET communication interface for FloTron

1 master input; 7 actuator outputs.

MFC-01-MIC-EEE

High-speed Mass Flow Controller


range: 10-500 sccm; EEE is the size in sccm.

MFC-01-MED-EEEE

High-speed Mass Flow Controller


range: 1000-20000 sccm; EEEE is the size in sccm.

KBL-01-DDD

MFC to FloTron cable


DDD is the length in cm.

Note: due to our continuing product improvement efforts, specifications are subject to change without notice.

Contacts: www.flotron.net/contacts
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