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M. Deal, Stanford, 3/13/2006

Nanotechnology
Nano From the Greek word for dwarf and means for 10-9, or one billionth. In this case it refers to 10-9 meters, or 1 nanometer (nm).
1 nm is about 3 atoms long. Nanotechnology The science of manufacturing materials and machines at the nanometer, or atomic/molecular, scale.

M. Deal, Stanford, 3/13/2006

Start with a centimeter. Now divide it into 10 equal parts. Now divide that into 10 equal parts. Now divide that into 100 equal parts. Now divide that into 10 equal parts. Finally divide that into 100 equal parts. A centimeter is about the size of a bean.

Each part is a millimeter long. About the size of a flea. Each part is 100 micrometers long. About the size (width) of a human hair. Each part is a micrometer long. About the size of a bacterium. Each part is a 100 nanometers long. About the size of a virus. Each part is a nanometer. About the size of a small molecule.

How small is a nanometer? (and other small sizes)

1 cm 1 mm 100 m 1 m 100 nm 1 nm

M. Deal, Stanford, 3/13/2006

Most consider nanotechnology to be technology at sub-micron scale: 1-100s of nanometers. Even at the micron scale in the lateral dimensions, vertical dimensions are at the nanometer scale. Exact definition of nanotechnology is not clear. At SNF, we provide tools to do work at nanometer, micron, and up to mm scales.

Why is Small Good?

Faster Lighter Can get into small spaces Cheaper More energy efficient Different properties at very small scale

M. Deal, Stanford, 3/13/2006 Chad Mirkin, Northwestern University, in NYTimes article by K. Chang - 2005

M. Deal, Stanford, 3/13/2006

As with the fabrication of integrated circuits, nanotechnology is based on building structures and systems at very small sizes - to enhance performance and produce new properties and applications - for many types of systems (mechanical, biological, chemical, optical) in addition to electronic Much of impetus and technology for nanotechnology came from integrated circuit industry Intels transistors current and near-future
M. Deal, Stanford, 3/13/2006

Examples of Nanotechnology Applications

Supercomputer in your palm, perhaps made from silicon nanowires, carbon nanotubes or other organic materials Very tiny motors, pumps, gyroscopes, and accelerometers; helicopters the size of flies or smaller

Implantable drug delivery systems, artificial body parts, Fantastic Voyage robots Tiny bio- and chemical-sensors

Nano-composite materials and embedded particles for stain and wrinkle resistant clothes,for transparent zinc oxide sunscreen, and for photo ink that never fades.

nano-

M. Deal, Stanford, 3/13/2006

Mite spinning on micromotor (Sandia National Labs) Simulation of molecular motor and gear (NASA) Ants leg strength and motion measured on microsensor, for robot development (Stanford) Carbon nanotube transistor (Stanford)
M. Deal, Stanford, 3/13/2006

Bugbot for traveling and taking photos in human digestive system (Carnegie Mellon University) Nanoparticles that fluoresce and can track poisons, proteins, DNA, and cancer cells (University of Illinois) Iron nanoparticles (with high surface area-to-volume ratio) to clean poisons such as TCE from water (Lehigh University)
M. Deal, Stanford, 3/13/2006

How do you build something so small?

Top-down building something by starting with a larger component and carving away material (like a sculpture). In nanotechnology: patterning (using photolithography) and etching away material, as in building integrated circuits Bottom-up building something by assembling smaller components (like building a car engine). In nanotechnology: self-assembly of atoms and molecules, as in chemical and biological systems
M. Deal, Stanford, 3/13/2006

Top-down fabrication

M. Deal, Stanford, 3/13/2006

Limitations of top-down fabrication

Due to diffraction effects, the practical limit for optical lithography is around 0.1 microns (100 nm). To define smaller features, electron beams, or ebeams, (which have smaller wavelengths) can be used. Feature sizes smaller than 20 nm can be patterned. But e-beam projection systems using masks have not been fully developed yet instead, direct-write ebeam lithography has been used. While optical lithography works in parallel over the wafer (with high throughput), direct-write e-beam lithography works as a series process (with low throughput).
M. Deal, Stanford, 3/13/2006

SEM showing the vertical growth of nanowires for electronic devices (Stanford)

Bottom-up fabrication
Self-assembly of atoms and molecules (since top-down is very difficult for manufacturing at nanoscale level). Use of chemical and biological processes. Current day examples: Growth of nanowires from vapor, using gold nano-dot catalysts; Self-assembled monolayers (SAM) from solution.
Self-assembled organic monolayers for molecular transistors, etc. (Yale)

More extreme example: Self-replicating robots.

M. Deal, Stanford, 3/13/2006

Challenges of bottom-up fabrication

Getting the structures to grow exactly how and where you want them to Making complicated patterns Fabricating robust structures

Some common strategies: Use catalysts, stress fields, diffraction gratings to achieve selective growth in specific locations Use top-down processes in conjunction with bottom-up processes, and build on silicon substrates
M. Deal, Stanford, 3/13/2006

Tools are needed to analyze, visualize, and manipulate very small features In addition to standard integrated circuit processing tools, others such as atomic force microscopes (AFM) are utilized

How do you build something so small? (cont.)

AFM image of mica surface showing atomic structure. AFM tip, used to manipulate, image and measure atomic scale features. Positioning single atoms with scanning tunneling microscope (Xe on Ni). Eigler, IBM, 1990.
M. Deal, Stanford, 3/13/2006

How do you build something so small? (cont.)

Requires very clean environment: clean room

A lab user gowning-up in SNF Relative size of clean room contaminants Magnified image of contaminant on wafer surface, which can cause defects and failures in nanostructures
M. Deal, Stanford, 3/13/2006

Some nanotechnology purists say: Nanotechnology is just nanometer (atomic) scale and bottom-up fabrication. But may take years to develop. By then, top-down technologies may be developed at atomic scale. How does nanotechnology differ from biology, chemistry, bioengineering, chemical engineering, etc., which also involve interactions and/or structures at the the molecular or nanoscale level? Or from standard integrated circuit technology? NNI (govt.) says: Nanotechnology involves ... creating and using structures, devices and systems that have novel properties and functions because of their small and/or intermediate size which may eliminate standard integrated circuits, for example, but not novel electronic devices such as molecular transistors

Nanotechnology
M. Deal, Stanford, 3/13/2006

In any case, key features in this field are:

combining different sciences and technologies enhanced or new properties new applications all at very small dimensions.

And we now have sophisticated tools to build, characterize and utilize structures at the nanoscale, across a breadth of disciplines.

Nanotechnology
M. Deal, Stanford, 3/13/2006

SNF provides tools where researchers can do research in all areas of nanotechnology: - Either top-down (more common) or bottom-up (generally done on thin film substrates like silicon wafers and usually together with some sort of top-down technique) - Even when doing things at micron scale or larger (fabrication MEMS structures, doing thin film adhesion studies, etc.):

vertical dimension is nanometer, and/or its assumed that these can applied or extended to lateral nanoscale regime in many cases.
M. Deal, Stanford, 3/13/2006

Stanford Nanofabrication Facility (SNF)

10,000 sq.ft. clean room, available to any researcher in the world. Includes state-of-the-art equipment for nano- and micro-fabrication and research. Over 600 users last year, working in all areas of nano (and larger) fabrication. Funded by user fees and by NSF grant. Part of National Nanotechnology Infrastructure Network (NNIN). Grant includes expanded Education/Outreach component. Networked REU and RET programs Kids nanomagazine and on-line nanotechnology textbook Local programs with SNF, including tours and demos (on-site and remote) Also program in Social and Ethical Issues (SEI) in nanotechnology
M. Deal, Stanford, 3/13/2006

Why learn nanotechnology in K-12?

Important to study small things that you cant see.

Very multi-disciplinary (physics, chemistry, biology, mechanics, electronics, materials, earth sciences). Good example applications of all these areas of science, and shows how they act together. Interests both genders. Important societal and ethical issues. Fun! May motivate students to go into math, science, engineering.