Cleanroom & HVAC Design PDF

2/20/2011
Cleanrooms &
HVAC Systems Design Fundamentals
(Karachi, Pakistan, February 22, 2011)
Wei Sun, P.E.

ASHRAE
Clean Spaces Technical Committee (TC9.11) Chairman (07-10)
Healthcare Facilities Technical Committee (TC9.6) Member
Laboratory Systems Technical Committee (TC9.10) Member
IEST
Working Group CC012 (Cleanroom Design), Chairman
President
Engsysco, Inc.
Ann Arbor, Michigan, USA
www.engsysco.com
Engsysco
Contents
Definition and classifications
Standards
Nonviable, viable particles (microbiological) and airborne
molecular contamination (AMC)
Particle sources
Airflow quantity and pattern and floor arrangement
Airlock and pressurization
HVAC, plumbing, fire protection, and process systems
Common devices and equipment
Architectural construction materials, cleaning procedures,
testing standards and construction cost
CFD application
2/20/2011
Introduction
Applications
Semiconductor
Microelectronic
Pharmaceutical
Biotechnology
University
Aerospace
Automotive
Hospital
Miscellaneous
Cleanroom Definition
Definition - A specially constructed enclosed
area, its environment has following controlled
parameters:
Temperature
Airflow Pattern
Humidity
Sound and Vibration
Common Requirements
Pressurization
Particle Count
Microbial Contamination
Electrostatic Discharge (ESD)
Gaseous Contamination
Process Specific
Special & Unique Requirements
2/20/2011
Standards
U.S. Federal
Standard
209E
Airborne particulate cleanliness classes in cleanrooms and clean zones

(former US standard, canceled in November 2001)
ISO
Document
ISO-14644: Cleanrooms and Associated Controlled Environments
ISO-14644-1
Classification of Air Cleanliness
ISO-14644-2
Cleanroom Testing for Compliance
ISO-14644-3
Methods for Evaluating & Measuring Cleanrooms & Associated Controlled

Environments
ISO-14644-4
Cleanroom Design & Construction
ISO-14644-5
Cleanroom Operations
ISO-14644-6
Terms, Definitions & Units
ISO-14644-7
Enhanced Clean Devices
ISO-14644-8
Molecular Contamination
ISO-14698-1
Biocontamination: Control General Principles
ISO-14698-2
Biocontamination: Evaluation & Interpretation of Data
ISO-14698-3
Biocontamination: Methodology for Measuring Efficiency of Cleaning Inert

Surfaces
Classifications
Air Cleanliness Class Definition Comparison Between
FS 209 and ISO 14644
ISO
FS 209
14644
Class
Class
1
10
100
1000
10,000
100,000
1
2
3
4
5
6
7
8
9
0.1 m
FS 209
ISO 14644
0.2 m
FS 209
ISO 14644
0.3 m
FS 209
ISO 14644
0.5 m
FS 209
ISO 14644
1 m
FS 209
ISO 14644
5.0 m
FS 209
ISO 14644
Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3
10
2
100
24
10
4
35
1,000
7.5
237
3
102
1
35
8
350
10,000
75
2,370
30
1,020
10
352
83
100,000
750
23,700
300
10,200
100
3,520
832
29
1,000,000
237,000
102,000
1,000
35,200
8,320
7
293
10,000
352,000
83,200
70
2,930
100,000 3,520,000
832,000
700
29,300
35,200,000
8,320,000
293,000
2/20/2011
Classifications
Air Cleanliness Class Definition - FS 209
Old Air Cleanliness Class Definition - FS 209

100,000,000
10,000,000
PARTICLES PER CUBIC METERS
FS-100,000
1,000,000
FS-10,000
100,000
FS-100
FS-1,000
10,000
FS-10
1,000
FS-1
100
10
1
0.01
0.1
10
PARTICLE SIZE, m
Classifications
Air Cleanliness Class Definition - ISO 14644
Current Air Cleanliness Class Definition - ISO 14644

100,000,000
10,000,000
ISO-9
1,000,000
ISO-8
100,000
ISO-7
10,000
ISO-6
ISO-4
1,000
ISO-5
ISO-3
100
ISO-2
10
ISO-1
1
0.01
0.1
10
PARTICLE SIZE, m
2/20/2011
Classifications
Air Cleanliness Class Definition Comparison
Between FS 209 and ISO 14644
Classification Comparison Between FS 209 and ISO 14644

100,000,000
10,000,000
ISO-9
FS-100,000
1,000,000
FS-1,000
ISO-8
FS-10,000
100,000
FS-100
ISO-7
ISO-5
10,000
FS-10
ISO-6
ISO-4
1,000
FS-1
ISO-3
100
ISO-2
10
ISO-1
1
0.01
0.1
10
PARTICLE SIZE, m
Airborne Particles
Airborne particulates can be:
1.
2.
3.
Particles larger than 100 microns can be seen with

naked eyes.
Next step particles ranging from 0.001 to 100
microns are main interest of contamination for
years.
Atoms and molecules used to be considered too
small as industrial contamination, but not any more
after introduction of molecular contamination.
2/20/2011
Particle Sources & Control

Sources of Contamination
Outdoor air
External
Indoor transfer air

between rooms
People
Work surface
shedding
Process
equipment
Internal
Raw and semifinished material

Liquids,
pressurized gases
used in process
Chemicals used
for cleaning
Room
construction
materials
Description
Control Methods
Infiltration through
doors, and cracks at
windows, and walls
Tighter exterior wall

construction, exterior
zone pressurization,
vestibules at main
entrances, and seal
space penetrations.
Makeup air entering

through the air
conditioning systems
Multiple level filtrations
Infiltration through
doors, windows, and
wall penetrations for
pipes, ducts, etc.
Seal wall penetrations,

multiple level
pressurizations &
depressurizations to
obtain proper airflow
directions
Largest source of
internal particles: skin
scales, hair, textile
fibers
Rubbing one item
against another
Spray, painting,
welding, grinding
During transport
During preparation,
processing and
packaging
Out-gassing to room
Dust generated from
wall, floor, ceiling,
door, fibrous insulation
Garments, proper
gowning procedures, air
shower before entry
Use cleanroom suitable
or rated furniture
Local filtration and
exhaust
Equipment washing,
cleaning and
sterilization before
entry, use airlock &
pass-through
Local exhaust
Use cleanroom suitable
or rated cleaners
Constructed with
special building
materials
Microbiological Contamination & Control

Unlike non-viable particles, which cant
reproduce, microorganisms could reproduce at a
rapid speed if nutrition and environment are
favorable.
Microorganism can be classified as bacteria,
algae, fungi, protozoa and viruses. Some of
these are essential, useful and harmless, while
others are harmful and dangerous.
Control Methods
Physical:
Heat
Radiation
Filtration
Chemical:
Sterilization
Disinfection
2/20/2011
Airborne Particle Physical Controls

Filtration
Dilution
Isolation
Utilizing HEPA &

ULPA filters to
remove particles
from supply air
Diluting internally
contaminated air
with clean, filtered
air
Containing or
isolating particle
generations with
barriers
HEPA: 99.97%
(Ef.@0.3m)
ULPA: 99.9997%
(Ef.@0.12m)
Higher air
change
rate, better
dilution.
Process exhaust
Mini-environment
Typical Ceiling Filter Coverage

Class
US 209
100,000
10,000
1,000
100
10
1
ISO
9
8
7
6
5
4
3
2
1
Ceiling Filter
Coverage
5% - 15%
5% - 15%
15% - 20%
25% - 40%
35% - 70%
60% - 90%
60% - 100%
80% - 100%
80% - 100%
HEPA
or
ULPA
HEPA
ULPA
2/20/2011
Room Airflow Quantity

(Traditional Methodology)
ISO Class
FS-209 Class
Air Change
Per Hour
Range
700
100,000
5 48
600
10,000
60 90
1,000
150 240
100
240 480
10
300 540
360 540
IEST Recommended (RP-12)

Air Change Rate For Cleanrooms
600
Air Change Per Hour (ACH)
Classification
600
540
540
480
500
400
360
300
360
360
240
300
240
200
150
100
360 600
90
48
60
0
0
ISO Cleanliness Class
Airflow Patterns
Non-Unidirectional
(Conventional) Flow
Unidirectional
Flow
Mixed
Flow
Mini-Environment
Flow
2/20/2011
Cleanroom Floor Arrangements

Service Area
Ballroom
Office and
Support
Areas
Cleanrooms
Service Area
Service Area
Service Chase
Office and
Support
Areas
Cleanrooms
R
Service Area
Service Area
Mini-Environment
Office and
Support
Areas
Cleanrooms
C
Service Area
Example Fan Tower Arrangement

Visitors Corridor
Scrubbed Exhaust Air
Fan Tow er
Process Corridor
Waff le Slab
Silencer
Raised Floor
Maint. Corridor
Stair Case
Ceili ng + Filter
Pressurized Plenum
Cleanroom
Return Air
Basement
Make-Up Air
Perforated Slab
Cooling Coil
Pump
Chemical Supply Systems
Process Exhaust
Submai ns
Gas Cabinets
Process Supply Systems
2/20/2011
Example Fan Filter Units Arrangement

Scrubbed Exhaust Air
3.5m
2.2m
3.6m
Stair Case
Cleanroom
9.6m
4.8m
Ret urn Air

4.8m
Basement
0. 0m
Make-Up Air
Gas Cabinets
Submains
Process Suppl y Syst ems
Process Supply Submains
Scrubber
Control Airflows Between Rooms

Air Lock
Air Lock
An intermediate room
between adjacent
areas with different
cleanliness to prevent
airborne cross
contamination
Type
Cascading
Bubble
Sink
Dual Compartment
CORRIDOR
AIRFLOW
CORRIDOR
AIRFLOW
AIRLOCK
AIRLOCK
++
++
AIRFLOW
CLEANROOM
AIRFLOW
CLEANROOM
+++
CASCADING AIRLOCK
CORRIDOR
AIRFLOW
AIRLOCK
BUBBLE AIRLOCK
CORRIDOR
AIRFLOW
AIRLOCK
--
++
AIRFLOW
CLEANROOM
SINK AIRLOCK
CLEANROOM
AIRLOCK
--
AIRFLOW
DUAL COMPARTMENT AIRLOCK
10
2/20/2011

Air Lock
Type of
Application
Positive or
Negative
Pressure?
Has Fume or Bio
Contamination?
Containment
Needed?
Personal
Protection
Needed?
Cleanroom
Positive pressure
Selection
of Airlock
Functionality of
Cascading
Prevent cleanroom being

contaminated from dirty
corridor air
No fume or bio agent

No containment
needed
Prevent cleanroom
being
contaminated
from
surrounding
spaces
through cracks
Negative pressure
Bubble
Has fume or bio

agent contamination
Negative pressure
Sink
Has fume or bio

agent contamination
Has toxic fume or

hazardous bio agent
contamination, or has
potent compound
substan ces
Containment needed
on

corridor air
Allow cleanroom fume
or
bio agent releas ing to
airlock. No personal
protective equipment
is
needed
Containment needed
Negative pressure

corridor air
Prevent cleanroom fume
or bio agent
releas ing to
corridor
Containment needed
Personal protecti
needed
Airlock
Dual
Compart ment

corridor air
Prevent cleanroom fume
or bio agent
releas ing to
corridor
Relative
Pressure
Relationship
Cleanroom:
Airlock:
Corridor:
Cleanroom:
Airlock:
Corridor:
Cleanroom:
+++
++
+
++
+
Airlock:
- -
Corridor:
Cleanroom:
Neg. Airlock:
- -
Pos. Airlock:
++
Corridor:
Personal protective
equipment (such as
pressurized suit and
respirat or) is required
Notes:
1.
2.
EXCESSIVE NEGATIVE P
RESSURE IN CLEANROOM
IS NOT RECOMMENDED,
SINCE IF IT IS NOT S
URROUNDED BY OTHER C
LEAN SPACES S, UNTREATED
DIRTY AIR CAN INFILT
RATE THROUGH
CRACKS INTO CLEANROO
M.
COMMONLY A CLEANROOM SERVICE
CORRIDOR NEEDS TO BE
DESIGNED
SLIGHTLY POSITIVE OR
NEUTRAL PRESSURE , DO NOT DESIGN IT I
N NEGATIVE
PRESSURE UNLESS A DU
AL-COMPARTMENT
LOCK IS UTILIZED.

Pressurization
Air should always flows from high pressure to low pressure

area. Normally the desired flow path should be from the area of
cleanest, to less-clean, to less-contaminated, and then to dirty
areas.
Pressurization is defined as a technique that air pressure

differences are created mechanically between rooms to
introduce intentional air movement paths through room leakage
openings. These openings could be either designated, such as
doorways, or undesignated, such as air gaps around
doorframes or other cracks.
11
2/20/2011

Pressurization
2,000
Single Room Pressurization
400
1,900
Leakage Area
(Sq. in.)
1,800
1,700
Room pressurization
Room depressurization
Entering (SA) airflow rate is
lower than leaving (EA +
RA) airflow rate in the
room, room net (offset)
flow is negative.
360
340
1,600
320
1,500
Leakage Flowrate (cfm)
Entering (SA) airflow rate is

higher than leaving (EA +
RA) airflow rate in the
room, room net (offset)
flow is positive.
380
300
1,400
280
1,300
260
1,200
240
1,100
220
1,000
200
900
180
800
160
700
140
600
120
500
100
400
80
300
60
200
40
20
100
0
0
0.005 0.01 0.015 0.02 0.025 0.03 0.035 0.04 0.045 0.05 0.055 0.06 0.065 0.07 0.075 0.08
Pressure Differential Between Rooms (in.)
Room Net Flow Rate vs. Pressure Differential

Pressurization
Single Room Pressurization
Room Pressure Control Strategies

Room Airtightness is the key element in the
relationship between the rooms flow offset
value and the resulting pressure
differential, and each room airtightness is
unique and unknown unless tested.
The treatment of the room net flow offset
value defines a pressurization control
strategy. Typical pressurization control
techniques:
Direct Pressure-Differential Control

Differential Flow Tracking Control
Hybrid Control
12
2/20/2011

Pressurization
Multiple Room (Suite) Pressurization
Room Pressure & Flow (P&F) diagram

(suite, zone or floor) The basis of
continuous validation and qualification
of room pressure control:
Indicate airflow design settings
(values) of all supply, return and
exhaust registers.
Indicate the desired room
pressure value with an acceptable
tolerance.
Indicate the resulting leakage flow
directions (due to room pressure
differentials) and their estimated
leakage values through doors at
closed-door condition.
Typical HVAC Systems
FS209 Class
10,000, 100,000
ISO Class
7, 8
13
2/20/2011
FS209 Class
100, 1,000
ISO Class
5, 6
FS209 Class
1, 10
ISO Class
3, 4
14
2/20/2011
Basic HVAC Flow Diagrams

Configuration-1: Conventional Primary loop
AHU Unit
C
C
OA+RA
FILTER
SA
H
C
OA
Makeup
Air
Efficiency Ea
Co
Efficiency Eb
Supply
Air
HEPA
Space Impurity
Cs
Concentration
SA
RA
Space
Particle Generation
Q
Leakage
Air
Return
Cs
Air
EA
Exhaust
Air
Deposition
D
Cs
Ce

Configuration-2: Primary loop with supply bypass
SA
C
C
FILTER
AHU Unit
SA1
H
C
OA+RA
Makeup
Air
Efficiency Ea
SA2+RA
SA2
OA
Co
Efficiency Eb
Supply
Air
Space Impurity
Cs
Concentration
HEPA
SA1
RA
Space
Particle Generation
G
Q
Leakage
Air
Cs
Deposition
D
Return
Cs
Air
EA
Exhaust
Air
Ce
15
2/20/2011

Configuration-3: Primary loop with dual returns
AHU Unit
C
C
Efficiency Eb
OA+RA1
FILTER
FILTER
SA=OA+RA
H
C
OA
Makeup
Air
Efficiency Ea
RA1
Co
RA2
Efficiency Ec
Space Impurity
Cs
Concentration
HEPA
SA
Supply
Air
RA
Space
Return
Cs
Air
Particle Generation
G
Q
Leakage
Air
EA
Exhaust
Air
Deposition
D
Cs
Ce

Configuration-4: Primary loop plus secondary makeup unit
Primary Fan Unit
OA
Treated
Makeup
Air
C1
Efficiency Eb
C
C
H
C
FILTER
Secondary Makeup Unit

OA+RA
FILTER
SA
Efficiency Ea
OA
Makeup
Air
Co
Efficiency Ec
Supply
Air
Space Impurity
Cs
Concentration
HEPA
SA
RA
Space
Particle Generation
Q
Leakage
Air
Cs
G
Deposition
D
Return
Cs
Air
EA
Exhaust
Air
Ce
16
2/20/2011

Configuration-5: Primary loop plus secondary AHU unit with dual returns
Primary Fan Unit
Secondary AHU Unit

C
C
Treated
Makeup
Air
C1
Efficiency Eb
H
C
Efficiency Ea
RA1
Efficiency Ec
OA
FILTER
OA+RA2
OA+RA
FILTER
SA
Makeup
Air
Co
RA2
Space Impurity
Cs
Concentration
HEPA
SA
Supply
Air
RA
Space
Return
Cs
Air
Particle Generation
Q
Leakage
Air
EA
Exhaust
Air
Deposition
D
Cs
Ce

Configuration-6: Primary loop plus secondary AHU unit and tertiary
makeup unit with dual returns
Secondary AHU Unit
FILTER
OA+RA
Treated
Makeup
Air
C1
Efficiency Eb
RA1
Efficiency Ec
Supply
Air
C
C
Tertiary Makeup Unit

OA
H
C
Efficiency Ea
Treated
Makeup
Air
C1
C
C
H
C
Efficiency Ea
OA
Makeup
Air
Co
RA2
Space Impurity
Cs
Concentration
HEPA
SA
OA+RA2
FILTER
Primary Fan Unit

SA
RA
Space
Particle Generation
Q
Leakage
Air
Cs
G
Deposition
D
Return
Cs
Air
EA
Exhaust
Air
Ce
17
2/20/2011
Building Section Schematic
Semiconductor Fabrication Facility
Process and Building Systems

Building Systems Cleanroom HVAC&R
Cleanroom Process
City water & gas

services
Cold/hot water
distributions
Gas distributions
Storm, sanitary &
vent
Fire pump &
automatic sprinkler
systems
Emergency power
generator
HVAC & Indoor
comfort
Building
management
Make-up system
Recirculation system
Return air system
Temperature &
humidity controls
Room pressure control
Noise and vibration
control
Hydronic heating
Comfort chilled water
Cooling tower water
Particle counting
Gas detection
Static control
RO and DI waters
Process chilled water
Chemical gases and storages
Solvent drain and collection
Solvent gas exhaust
Process vacuum
Scrubbed exhaust
House vacuum
Acid drain and waste
neutralization
Clean dry air
Instrumentation air & control
18
2/20/2011
Typical Specified Cleanroom

Components, Devices & Equipment
Air
Sampling
HEPA / ULPA Filter
Air
Filtration
Handhold
Particle
Counter
Air Particle
Sensor
Portable Particle Counter
Fan-Filter Ceiling Module
Bag-in/Bag-out multiple filters

- Against biological, chemical
& radiological materials
Pharmaceutical cGMP
Particle Monitoring & Validation
Microbial Air Sampler &

Agar Media
Typical Specified Cleanroom

Components, Devices & Equipment
Air Valve
Precision
Room
Pressure
Transducer
Isolator (Glove Box)
Soft
Wall
Floor Grate
& Perforated
Panel
Small Mini-Environment
Product
Passthrough
19
2/20/2011
Cleanroom Building Exterior and Interior
Cleanrooms in Construction
Building Finished
Exterior
Finished Cleanrooms
Window on
Exterior Wall
Small Class 100,000
Cleanroom
Class 10,
Raised Floor
Window on
Interior Wall
Interior Hallway
Gowning Area,
Raised Floor
Service Hallway
Enclosing Cleanrooms
20
2/20/2011
Cleanroom Utility and Support
Large DI Water
System
AHU Unit for Office/

Administration Areas
Steam-Hot Water
Exchange Unit
(Packaged)
Cleanrooms In Operation
21
2/20/2011
Cleanroom Construction Materials

Classification
Wall System
FS Class
FS Class
1
10
ISO Class
ISO Class
1, 2 & 3
4
Aluminum Component
FS Class
100
ISO Class
5
FS Class
FS Class
FS Class
1,000
10,000
100,000
ISO Class
ISO Class
ISO Class
6
7
8&9
Aluminum Component or Metal Stud
Wall Panel
Honeycomb Aluminum Conductive Finish
Paint
Epoxy
Aluminum Polystyrene Core or

Epoxy Coated Steel Laminated
over Drywall
Epoxy / Latex
Ceiling Grid
2 Aluminum Gel Seal Ceiling System
1 Steel Gasketed
Grid Support
All thread with Strut & Turn buckles
Floor
Raised Floor with Perforated / Grated Access
Air Return
Floor
12 ga wire to grid, 10 ga wire to filter @ Corner of

Grid Intersection Only
Concrete Covered with Epoxy
Solids or Sheet Vinyl
Low Sidewall Low Sidewall
or Ceiling
Vinyl or Epoxy
Coated
Drywall
Latex
ISO Construction Cleaning Procedures

Stage
Purpose
Responsible party
Stage 1 Clean during

demolition or preliminary
construction such as
framing for wall
installation.
Preventing unnecessary dust

concentration in places that will be
difficult to reach during later
construction.
Contractor. If the construction

Vacuum clean upon completion.
contractor has no relevant
experience in cleanroom cleaning,
it is advisable to hire a professional
cleaning contractor specializing in
cleanroom cleaning.
Visual-clean.

utility installation.
Removing local contaminants caused

by installing electricity, gas, water, etc.
Installation engineer.
Visual-clean.

early construction.
Cleaning all visible contamination from Cleaning contractor.

ceilings, walls, floors, (filter mountings),
etc. after completion of construction and
installation activities.
Stage 4 Prepare for

Cleaning any dust from ductwork
Installation engineer and cleaning
air conditioning ductwork sections before installing using a
contractor.
installation.
vacuum cleaner and wipers. Meanwhile,
a positive pressure should be
introduced to the cleanroom.
Stage 5 Clean before
mounting all air filters
into the system.
Stage 6 Mount the
(HEPA/ULPA) filters into
the air systems
Method
Vacuum clean; wipe-down piping

and fixtures with moistened wipers
upon completion. The use of
vacuum cleaning and/or other
cleaning materials is necessary.
Standard

Visual-clean.
and fixtures with moistened wipers.
Application of protective floor
sealants is generally a particle
generating activity. If this is
necessary, it should be applied at
this time.
Vacuum clean; wipe down with
Wiper-clean.
moistened wipers.
Removing deposited or settled dust, or

both, from ceilings, walls, and floors.
Cleaning contractor.
Wipe down with moistened wipers.
Wiper-clean.
Removing possible contamination

caused by the mounting operation.
Cleanroom HVAC filter engineer/

technician.
Clean all surface edges on all

sides.
Wiper-clean.
Stage 7 Adjust the air Removing suspended dust from the

conditioning equipment. airflow and creating overpressure
installation, including the filters.

technician.
Air conditioning air flushing

operation.
Wiper-clean.
Stage 8 Upgrade the

room into prescribed
classification.
Removing all deposited and clinging

dust from every surface (in order:
ceilings, walls, equipment, floors).
A professional cleanroom cleaning

by personnel specially instructed
on regulations, routing and
behaviour.
Wiper-clean.
Stage 9 Approve
installation.
Verifying the cleanroom to the

prescribed design specifications.
Installation engineer and

certification engineer.
Monitor airborne and surface

particles, air velocities,
Wiper-clean. Results
should conform to
22

demolition or preliminary
construction such as
framing for wall
installation.
Preventing unnecessary dust

concentration in places that will be
construction.
Contractor. If the construction

Vacuum clean upon completion.
it is advisable to hire a professional
cleaning contractor specializing in
cleanroom cleaning.
Visual-clean.

utility installation.
Removing local contaminants caused

by installing electricity, gas, water, etc.
Installation engineer.
Visual-clean.

early construction.
Cleaning all visible contamination from Cleaning contractor.

installation activities.

and fixtures with moistened wipers
cleaning materials is necessary.
2/20/2011

Visual-clean.
sealants is generally a particle
generating activity. If this is
necessary, it should be applied at
this time.
Wiper-clean.
moistened wipers.
ISO Construction Cleaning Procedures

Stage 4 Prepare for
air conditioning ductwork sections before installing using a
contractor.
installation.
vacuum cleaner and wipers. Meanwhile,
Stage
Purpose
Responsible party
Method
Standard
Contractor.
If the construction
itCleanroom
is advisable
to hire
a professional
HVAC
filter
engineer/
cleaning
contractor specializing in
technician.
cleanroom cleaning.
Vacuum
clean
completion.
Wipe down
withupon
moistened
wipers.
Visual-clean.
Wiper-clean.

sides.
Wiper-clean.
Removing
contaminants
caused
Removing local
suspended
dust from
the
by
installing
electricity,
gas, water, etc.
airflow
and creating
overpressure
Installation
Cleanroom engineer.
HVAC filter engineer/
technician.
Visual-clean.
Wiper-clean.

Cleaning all visible contamination from
installation
Verifying theactivities.
cleanroom to the
Customer acceptance.

behaviour.
Vacuum
clean; wipe-down
Air conditioning
air flushingpiping
and
fixtures with moistened wipers
operation.
cleaning
materials
is necessary.
Wipe down
with moistened
wipers.
sealants
is generally
particle
Monitor airborne
and asurface
generating
If this is
particles, airactivity.
velocities,
necessary,
should
be applied at
temperatureit and
humidity.
this time.
Listed in F.1 to F.8.
moistened wipers.
Visual-clean.
Stage
Stage 15
Clean
Clean during
before
demolition
preliminary
mounting allorair
filters
construction
such as
into the system.
framing
wall the
Stage 6 for
Mount
installation.
(HEPA/ULPA) filters into
the air systems
Stage
Stage 27
Clean
Adjust during
the air
utility
installation.
conditioning
equipment.
Preventing
unnecessary
dust dust, or
Removing deposited
or settled
concentration
in places
that
willfloors.
be
both, from ceilings,
walls,
and
construction.
Stage 8 Upgrade the

classification.
early construction.
Stage 9 Approve
installation.
caused by the mounting operation.

Wiper-clean.
should conform to
agreed design criteria.
Stage 10 Clean daily

Stage 4 Prepare for
and periodically
air conditioning ductwork
installation.
Maintaining the cleanroom in long-term Cleanroom manager/cleaning

compliance with designed classification. contractor.
sections before installing using a
contractor.
Microbiological
and Meanwhile,
testing
vacuum
cleanercleaning
and wipers.
begins in biocleanrooms.
A tailor-made cleaning
Wiper-clean.
programme for the
cleanroom, accounting
for the specific
demands of the
production process
Stage 5 Clean before Removing deposited or settled dust, or Cleaning contractor.
Wipe down with moistened wipers. Wiper-clean.
and the customer.
mounting all air filters
both, from ceilings, walls, and floors.
Routine testing of
into the system.
critical operation
parameters.
Stage 6 Mount the
Wiper-clean.
(HEPA/ULPA)
filters
into
caused
by
the
mounting
operation.
technician.
sides.
NOTE 1 During Stages 4 to 10, all high-efficiency and ultra-high-purity components, such as filters, ducts, etc., should arrive on site protected by plastic or foil covers on
the
systems
bothairends.
Covers should only be removed when ready for use. NOTE 2 During Stages 6 to 10, all activities should be done wearing prescribed cleanroom clothing.
Stage 7 Adjust the air Removing suspended dust from the
Air conditioning air flushing
Wiper-clean.
conditioning equipment. airflow and creating overpressure
technician.
operation.
Stage 8 Upgrade the
classification.


behaviour.
Wiper-clean.
Stage 9 Approve
installation.
Verifying the cleanroom to the

Customer acceptance.

Monitor airborne and surface

particles, air velocities,
temperature and humidity.
should conform to
agreed design criteria.
Stage 10 Clean daily

and periodically
Maintaining the cleanroom in long-term

compliance with designed classification.
Microbiological cleaning and testing
begins in biocleanrooms.
Cleanroom manager/cleaning
contractor.
Listed in F.1 to F.8.
A tailor-made cleaning
programme for the
cleanroom, accounting
for the specific
demands of the
production process
and the customer.
Routine testing of
critical operation
Required Testing (ISO 14644-2)
parameters.
NOTE 1 During Stages 4 to 10, all high-efficiency and ultra-high-purity components, such as filters, ducts, etc., should arrive on site protected by plastic or foil covers on
both ends. Covers should only be removed when ready for use. NOTE 2 During Stages 6 to 10, all activities should be done wearing prescribed cleanroom clothing.
Cleanroom Testing
Schedule of Tests to Demonstrate Continuing Compliance

<= ISO 5
Maximum Time
Interval
6 Months
> ISO 5
12 Months
Air Pressure Difference
All Classes
12 Months
ISO 14644-1 Annex B5
Airflow
All Classes
12 Months
Test Parameter
Particle Count Test
Class
Test Procedure
ISO 14644-1 Annex A
Optional Testing (ISO 14644-2)
Schedule of Additional Optional Tests

Test Parameter
Class
Installed Filter Leakage

Containment Leakage
All Classes
All Classes
Maximum Time
Interval
24 Months
24 Months
Recovery
All Classes
24 Months
Airflow Visualization
All Classes
24 Months
Test Procedure
23
2/20/2011
Cleanroom Design Problems & Validation

Common Design Problems
Poor laminarity
Fail to pressurize to specified pressure levels
Local stagnation near point of service
Ineffective chemical vapor exhaust
Too high noise

Temperature & humidity variations above specifications
How to Ensure Quality During Design Phase?

Engineers design knowledge & experience
Mock-up or scale-down model
CFD validation
CFD Applications
Narrower
Cleanroom with
35% FA Floor
Panels
Cleanroom
with 35% FA
Floor Panels
A case study: Examination of flow laminarity of a cleanroom with a

subfab underneath
Cleanroom
with 20% FA
Floor Panels
Floor
Ceiling
FAB
CHASE
SUBFAB
Slab
Cleanroom
with 10% FA
Floor Panels
CFD model geometry
24
2/20/2011
Technology Trend Determination of Airflow

Rate Based on Particle Generation Rate
During Design Phase
Room Particle Concentration versus Air Change Rate
(Steady State)
- Effect of Internal Particle Generation Rate
Concentration (Number of Particles Per FT3)
1,000,000.0
Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space
Condition:
100,000.0
OA/SA=5%
CO=1x106
EU=95%
EH=99.97%
=1.0
10,000.0
1,000.0
Unit:
Particals/FT3/Min.
100.0
G=1
10.0
G=10
G=100
G=1000
1.0
G=10000
0.1
0
100
200
300
400
500
600
Supply Air ACH (Air Change Per Hour)
Technology Trend Provide Airflow Rate

Based on Particle Generation Rate
During Operating Phase
ACH Rate
Staged Ventilation
VFD Ventilation
Room Particle Generation Rate G
The goal is to stage the ventilation rate to maintain the same room cleanliness
level through particle sensing during all modes (occupied and unoccupied)
25

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2/20/2011

Wei Sun, P.E.

Special & Unique Requirements

Airborne particulate cleanliness classes in cleanrooms and clean zones

ISO-14644: Cleanrooms and Associated Controlled Environments

Classification of Air Cleanliness

Cleanroom Testing for Compliance

Methods for Evaluating & Measuring Cleanrooms & Associated Controlled

Cleanroom Design & Construction

Terms, Definitions & Units

Enhanced Clean Devices

Biocontamination: Control General Principles

Biocontamination: Evaluation & Interpretation of Data

Biocontamination: Methodology for Measuring Efficiency of Cleaning Inert

Old Air Cleanliness Class Definition - FS 209

PARTICLES PER CUBIC METERS

Current Air Cleanliness Class Definition - ISO 14644

PARTICLES PER CUBIC METERS

Classification Comparison Between FS 209 and ISO 14644

PARTICLES PER CUBIC METERS

Particles larger than 100 microns can be seen with

Particle Sources & Control

Indoor transfer air

Raw and semifinished material

Tighter exterior wall

Makeup air entering

Multiple level filtrations

Seal wall penetrations,

Microbiological Contamination & Control

Airborne Particle Physical Controls

Utilizing HEPA &

Typical Ceiling Filter Coverage

Room Airflow Quantity

IEST Recommended (RP-12)

Air Change Per Hour (ACH)

ISO Cleanliness Class

Cleanroom Floor Arrangements

Example Fan Tower Arrangement

Scrubbed Exhaust Air

Chemical Supply Systems

Process Supply Systems

Example Fan Filter Units Arrangement

Ret urn Air

Process Suppl y Syst ems

Process Supply Submains

Control Airflows Between Rooms

DUAL COMPARTMENT AIRLOCK

Control Airflows Between Rooms

Prevent cleanroom being

No fume or bio agent

Has fume or bio

Has fume or bio

Has toxic fume or

Prevent cleanroom being

Prevent cleanroom being

Prevent cleanroom being

Control Airflows Between Rooms

Air should always flows from high pressure to low pressure

Pressurization is defined as a technique that air pressure

Control Airflows Between Rooms

Single Room Pressurization

Leakage Flowrate (cfm)

Entering (SA) airflow rate is