Documentos de Académico
Documentos de Profesional
Documentos de Cultura
Lecture Outline
Details of the physical structure of devices will be very
important in developing models for electrical behavior
Device structure is better understood by following through
fabrication sequence
The basic processing steps used in fabricating integrated
devices will be examined in this lecture, then the use of
these process steps in fabricating a diode, bipolar junction
transistor or FET will be dealt with in later lectures
David J. Walkey
Page 2
Ingot Growth
David J. Walkey
Page 3
Ingot Growth
David J. Walkey
Page 4
Wafer Sawing
Ingots are then sawed into wafers approximately 500-1000
m (0.5 to 1 mm) thick using a diamond tipped saw
Wafers are the starting material for integrated circuit
manufacture, and are normally referred to as the substrate
Surface of the wafer is smoothed with combination of
chemical and mechanical polishing steps
David J. Walkey
Page 5
Photolithography
Lithography refers to the transfer of an image onto paper
using a plate and ink-soluble grease
Photolithography is the transfer of an image using
photographic techniques
Photolithography transfers designer generated information
(device placement and interconnections) to an actual IC
structure using masks which contain the geometrical
information
The process of photolithography is repeated many times in
manufacture of an IC to build up device structures and
interconnections
David J. Walkey
Page 6
David J. Walkey
Page 7
Photolithography - Exposure
David J. Walkey
UV radiation
mask
mask
wafer
Page 8
Photolithography - Development
David J. Walkey
Page 9
David J. Walkey
selected area
wafer
Page 10
David J. Walkey
Page 11
David J. Walkey
Page 12
David J. Walkey
Page 13
David J. Walkey
4:1 Reticle
Page 14
David J. Walkey
layer 1 mask
layer 2 mask
layer 3 mask
layer 4 mask
Page 15
David J. Walkey
Page 16
David J. Walkey
Page 17
David J. Walkey
Page 18
David J. Walkey
Page 19
Oxidation - System
David J. Walkey
Page 20
David J. Walkey
Page 21
David J. Walkey
Page 22
Local Oxidation
David J. Walkey
Page 23
Dopant Diffusion
David J. Walkey
Page 24
Ion Implantation
David J. Walkey
Page 25
Ion source
Plasma
Extraction assembly
Analyzing magnet
Ion beam
Acceleratio
n column
Process
chamber
Scanning
disk
David J. Walkey
Page 26
David J. Walkey
Page 27
Deposition
Layers of materials such as metal (and in some cases
silicon dioxide) may need to be formed on the surface
General procedure of forming a layer of material on the
surface is termed deposition
Two types can be identified, physical and chemical
In physical deposition, a piece (target) of the material to be
deposited is bombarded with ions, ejecting atoms of material
which then adhere to the substrate surface
Chemical deposition uses an ongoing chemical reaction to form the
desired material as a precipitate on the substrate surface
Page 28
Sputtering System
David J. Walkey
Page 29
Patterning
The use of a series of PR deposition, exposure,
development and etching to create regions of particular
shape is called patterning
For example, if a newly deposited metal layer was coated
with PR, exposed using a mask, developed and etched
using a method which selectively removed the metal not
covered by the PR, this would be referred to as
patterning the metal
There will be many individual patterning steps in the
creation of a useful integrated structure
David J. Walkey
Page 30
David J. Walkey
Page 31
David J. Walkey
Page 32
Dicing Machine
David J. Walkey
Page 33
Lecture Summary
A number of important processing steps were discussed
Wafer preparation
Photolithography
Etching
Thermal and Local Oxidation
Dopant Diffusion and Ion Implantation
Deposition
Patterning
Scribing and cleaving
David J. Walkey
Page 34
Lecture Outline
Last lecture described a number of processing techniques
used to fabricate integrated circuits
This lecture will show how those techniques are used
together, some many times, in fabricating three integrated
diode structures
As more complex structures are considered, the level of
detail in the descriptions will be reduced
David J. Walkey
Page 2
David J. Walkey
Page 3
First step is to deposit a layer of silicon nitride (Si3N4) over the wafer
surface
Would normally be done using chemical vapor deposition (CVD)
David J. Walkey
Page 4
David J. Walkey
Page 5
David J. Walkey
Page 6
David J. Walkey
Page 7
David J. Walkey
Page 8
When the nitride etching is complete, all of the nitride layer outside the
remaining area of photoresist has been removed
Both nitride and photoresist remain in the exposed area
David J. Walkey
Page 9
David J. Walkey
Page 10
David J. Walkey
Page 11
David J. Walkey
Page 12
David J. Walkey
Page 13
David J. Walkey
Page 14
David J. Walkey
Page 15
Well Diode
Two problems with the substrate diode:
Current flows through the entire thickness of the substrate (500 1000 m) to reach the back contact
Substrate is common for all diodes on the chip, diodes all have a
common connection
Page 16
David J. Walkey
Page 17
David J. Walkey
Page 18
To connect to the well, a highly doped region of the same type as the
well is created
All the usual patterning steps are used (PR deposition, exposure with
mask, development, removal of PR)
David J. Walkey
Page 19
David J. Walkey
Page 20
David J. Walkey
Page 21
Contact cuts are etched through the isolation oxide to the diffusions
using a full series of patterning steps
Metal is deposited on the surface and patterned for interconnections
Provided the well to substrate junction is reverse biased, the well diode
is isolated from the substrate, and hence from other devices
David J. Walkey
Page 22
Epitaxial Diode
Well diode is an improvement over the substrate diode, but
current flow is lateral so the exact performance is hard to
predict
Best solution, but with corresponding process complexity,
is the epitaxial diode, fabricated on an epitaxial layer of
silicon
David J. Walkey
Page 23
David J. Walkey
Page 24
David J. Walkey
Page 25
David J. Walkey
Page 26
David J. Walkey
Page 27
David J. Walkey
Page 28
David J. Walkey
Page 29
The active diode area is only a small portion of the epitaxial structure
Current flow in the epi diode is through the active area, along the
buried layer and up and out the n+ contact diffusion
Benefit is well controlled current flow path
Also forms a major portion of the structure of an integrated BJT
David J. Walkey
Page 30
Al
n+
p+
p+
p+
n+
n- epitaxial layer
p+
n+ buried layer
n-well
substrate thickness not to scale
p-substrate
David J. Walkey
Page 31
Lecture Summary
The use of the basic processing techniques from lecture 4
in creating three diode structures was discussed
Note that many of the techniques are performed over and
over as successive features are created
The substrate diode is simple but suffers from at least one
disadvantage all substrate diodes have one terminal
connected together
The well diode is an improvement, but has primarily lateral
flow, which can be difficult to characterize
The epi diode gives the best performance, but is much
more complex to fabricate than the first two
David J. Walkey
Page 32
Lecture Outline
Now move on to bipolar junction transistor (BJT)
Strategy for next few lectures similar to diode: structure
and processing, basic operation, basic quantitative
modeling, more advanced features
This lecture begins by looking at the structure and
processing of the double diffused planar structure, very
similar to epi-diode as well as layout from point of view of
ASIC designer
Then consider basic current flow in structure, 1D
approximation and nomenclature
Calculate depletion widths for junctions
David J. Walkey
Page 2
David J. Walkey
Page 3
David J. Walkey
Page 4
David J. Walkey
Page 5
Photoresist spun on top of the oxide is exposed using the buried layer
mask (mask #1)
The BL mask is usually generated automatically from other masks
David J. Walkey
Page 6
David J. Walkey
Page 7
David J. Walkey
Page 8
The buried layer is formed with a high density (dose) implant of n-type
dopant, usually Phosphorous
Some lateral diffusion of dopants takes place during the implant
Dopant is also introduced into the masking oxide
David J. Walkey
Page 9
David J. Walkey
Page 10
David J. Walkey
Page 11
The resulting epitaxial layer will form the collector region in the BJT,
with the highly doped (low R) buried layer forming an equipotential
region under the device
Note that the buried layer is now completely enclosed in silicon
material
David J. Walkey
Page 12
David J. Walkey
Page 13
David J. Walkey
Page 14
After a long enough implant so that the isolation regions reach the
underlying substrate, the masking oxide is removed
David J. Walkey
Page 15
David J. Walkey
Page 16
David J. Walkey
Page 17
David J. Walkey
Page 18
David J. Walkey
Page 19
Oxide/PR are formed on the surface, and the region which will form
the active base is exposed using the base mask (mask #4)
David J. Walkey
Page 20
A p-type dopant (usually Boron) is implanted into the epi layer through
the oxide window to form the p-type base region
David J. Walkey
Page 21
David J. Walkey
Page 22
David J. Walkey
Page 23
David J. Walkey
Page 24
With the creation of the n+ emitter region in the p-base (in the n-epi
collector), the basic BJT structure is complete, only metal contacts
remain
David J. Walkey
Page 25
David J. Walkey
Page 26
David J. Walkey
Page 27
After etching, openings have been created in the oxide which will
allow access to the collector sinker, base and emitter regions
David J. Walkey
Page 28
David J. Walkey
Page 29
David J. Walkey
Page 30
David J. Walkey
Page 31
David J. Walkey
Page 32
In the integrated BJT structure, the principle current flow for normal
operation is through the sinker, buried layer and up through the vertical
npn structure
The actual active area of the device is a relatively small portion of the
overall structure
David J. Walkey
Page 33
BJT 1D Approximation
AE = bE l E
David J. Walkey
Page 34
BJT Nomenclature
Quantity
Emitter
Base
Doping
NDE
NAB
NDC
/cm3
Minority
Concentration
pEo
nBo
pCo
/cm3
Diffusion
Coefficient
DpE
DnB
DpC
cm2/sec
David J. Walkey
Collector Units
Page 35
An npn BJT has two pn-junctions, and hence two depletion regions
Label the widths of the base-emitter and base-collector depletion
regions WBE and WBC, respectively
Widths of remaining neutral region in collector, base and emitter are
WC, WB and WE, respectively
David J. Walkey
Page 36
David J. Walkey
kT N AB N DE
=
ln
2
q ni
VbiBC
kT N AB N DC
=
ln
2
q ni
WBE =
2 Si 1
1
+
(VbiBE VBE )
q N AB N DE
WBC =
2 Si 1
1
+
(VbiBC VBC )
q N AB N DC
ELEC 3908, Physical Electronics:
BJT Structure and Fabrication (15)
Page 37
David J. Walkey
Page 38
WBE =
WBC =
VbiBE
1017 1019
= 0.93 V
= 0.026 ln
10 2
(1.45 10 )
VbiBC
1017 5 1015
= 0.74 V
= 0.026 ln
10 2
(1.45 10 )
2 11.7 8.854 10 14 1
1
17 + 19 ( 0.93 0.8) = 4.2 10 6 cm
19
10
1.6 10
10
2 11.7 8.854 10 14
1.6 10 19
David J. Walkey
1
1
5
(
)
cm
17 +
15 0.74 + 0.7 = 6.3 10
10
5 10
Page 39
N AB
WC = 4 10 4 WBC
N AB + N DC
1017
= 4 10 6.3 10 17
15
10 + 5 10
4
= 3.4 10 4 cm
David J. Walkey
Page 40
N AB
WE = 1 10 WBE
N AB + N DE
4
1017
= 4 10 4.2 10 17
10 + 1019
4
1 10 4 cm
David J. Walkey
Page 41
N DE
N DC
WB = 15
. 10 4 WBE
WBC
N
+
N
N
+
N
DE
DC
AB
AB
1019
5 1015
5
. 10 4.2 10 19
= 15
6.3 10
10 + 1017
5 1015 + 1017
4
. 10 4 cm
= 14
David J. Walkey
Page 42
145
. 10 )
(
=
10 2
pEo =
n
N DE
nBo =
. 10
(145
n
=
1017
N AB
2
i
= 21 / cm 3
19
10
10 2
= 21
. 103 / cm 3
145
. 1010 )
(
ni2
=
= 4.2 104 / cm 3
pCo =
15
5 10
N DC
2
D pE = D pC =
kT
p = 12.2 cm 2 sec
q
kT
n = 34.9 cm 2 sec
DnB =
q
David J. Walkey
Page 43
Lecture Summary
Looked in detail at fabrication of double diffused structure
Current flow path illustrates importance of conductive epi
buried layer
1D approximation uses emitter area AE
Three regions require slightly more complex naming
scheme for dopings, etc.
Depletion widths calculated based on pn junction
equation applied to each junction
Base neutral width is region of base not accounted for by
depletion regions
David J. Walkey
Page 44
Lecture Outline
To better understand how to model the behavior of the
MOSFET, begin the same way as the diode and bipolar,
consider fabrication of the basic structure
An important fundamental quantity, the oxide capacitance,
will be identified from the structure
The layout of masks for the MOSFET structure will be
considered, and the effective channel length identified
from processing considerations
David J. Walkey
Page 2
David J. Walkey
Page 3
David J. Walkey
Page 4
David J. Walkey
Page 5
ox
$
Cox
tox
David J. Walkey
Page 6
David J. Walkey
Page 7
1 m 100 cm
7
=
20
10
cm
9
10 nm 1 m
2
7
C$ ox =
.
173
10
=
F
cm
20 10 7
David J. Walkey
Page 8
David J. Walkey
Page 9
David J. Walkey
Page 10
MOSFET Symbols
David J. Walkey
Page 11
David J. Walkey
Page 12
David J. Walkey
Page 13
David J. Walkey
Page 14
David J. Walkey
Page 15
David J. Walkey
Page 16
David J. Walkey
Page 17
David J. Walkey
Page 18
David J. Walkey
Page 19
David J. Walkey
Page 20
David J. Walkey
Page 21
David J. Walkey
Page 22
MOSFET Geometry
David J. Walkey
Page 23
Lecture Summary
The fabrication of a basic MOSFET structure was
illustrated, and the oxide capacitance defined in terms of
the gate oxide thickness
The self-aligned MOSFET structure avoids a difficult
alignment of the gate and source/drain regions, allowing
smaller devices - benefits will be discussed in lecture 27
Because of lateral diffusion under the gate, the effective
channel length is less than the drawn channel length
Internal quantities will be assumed independent of position
along the MOSFET width (but not length)
David J. Walkey
Page 24